Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
A method of manufacturing an organic light-emitting display device includes: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber, the chuck moving member being moved along the guide member by an association of a chain unit and a hook unit, and the substrate being spaced apart from the organic layer deposition assembly.
1. A method of manufacturing an organic light-emitting display device, the method comprising:
fixing a substrate onto an electrostatic chuck;
combining the electrostatic chuck with a chuck moving member;
moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and
depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber,
wherein the chuck moving member is moved along the guide member by an association of a chain, unit and a hook unit, and
wherein the substrate is spaced apart from the organic layer deposition assembly.
2. The method of claim 1 ,
wherein the chuck moving member comprises the hook unit having a variable height, and
wherein the guide member comprises the chain unit corresponding to the hook unit.
3. The method of claim 2 , wherein the chain unit comprises:
a sprocket rotatably arranged on the guide member; and
a timing chain configured to surround an external surface of the sprocket.
4. The method of claim 3 , wherein the timing chain is arranged in a lengthwise direction of the guide member.
5. The method of claim 3 , wherein the chain unit further comprises a driving unit connected to and configured to rotate the sprocket.
6. The method of claim 5 ,
wherein, the organic layer deposition assembly, the electrostatic chuck, the chuck moving member, and the guide member are arranged in the chamber, and
wherein the driving unit is outside the chamber and connected to the sprocket via a shaft.
7. The method of claim 2 , wherein the hook unit comprises:
a hook housing, on the chuck moving member;
a hook combined with the hook housing to allow the hook housing to be linearly moved; and
an elastic part combined with the hook housing and the hook.
8. The method of claim 7 , wherein the hook is contactable with the chain unit to be linearly moved in a height direction of the hook housing.
9. The method of claim 1 , wherein the moving of the electrostatic chuck comprises:
generating a driving force to rotate a shaft by using a driving unit;
rotating a timing chain as a sprocket rotates due to the rotation of the shaft; and
inserting a hook into the timing chain due to the rotation of the timing chain to move the chuck moving member along the guide member.