Substrate processing apparatus and method of disassembling and assembling the same
A substrate processing apparatus includes: a chamber including a body having an open portion and a door for blocking the open portion; a substrate supporter connected to the door; and a door operating means including a rotation shaft for straightly moving and rotating the door, the door and the body separated in parallel from each other by straightly moving the door.
1. A substrate processing apparatus, comprising:
a chamber including a body having an open portion and a door for blocking the open portion;
a substrate supporter connected to the door;
a door operating means including a rotation shaft for moving straightly and rotating the door, the door and the body separated in parallel from each other by moving straightly the door; and
a guiding plate for guiding the rotation shaft to move straightly and rotate,
wherein the door operating means further comprises:
a leading part connected to the door; and
a clamping part connected to the leading part and formed on a side surface of the chamber,
wherein the rotation shaft connects the leading part and the clamping part and the leading part is configured to rotate around the rotation shaft, and
wherein the guiding plate includes a straight guiding hole for guiding the rotation shaft to move straightly and a circular guiding hole for guiding the rotation shaft to move according to a rotation of the leading part.
2. The substrate processing apparatus according to claim 1 , wherein the straight guiding hole and the circular guiding hole correspond to the clamping part and the leading part, respectively.
3. A substrate processing apparatus, comprising:
a chamber including a body having an open portion and a door for blocking the open portion;
a substrate supporter connected to the door; and
a door operating means including a rotation shaft for moving straightly and rotating the door, the door and the body separated in parallel from each other by moving straightly the door,
wherein the door operating means further comprises:
a leading part connected to the door; and
a clamping part connected to the leading part and formed on a side surface of the chamber,
wherein the rotation shaft connects the leading part and the clamping part and the leading part is configured to rotate around the rotation shaft, and
wherein the leading part includes a first uneven portion at an end thereof and the clamping part includes a second uneven portion at an end thereof, and wherein the leading part and the clamping part combined with each other by inserting the rotation shaft into a through hole constituted by the first and second uneven portions.
4. The substrate processing apparatus according to claim 1 , wherein the body includes a concave portion where the leading part and the clamping part are formed.
5. The substrate processing apparatus according to claim 4 , wherein a guiding means for guiding the clamping part to move straightly is formed in the concave portion.
6. The substrate processing apparatus according to claim 5 , wherein the guiding means includes a bar fixed in the concave portion and a plurality of blocks movable straightly along the bar, and wherein the clamping part is fixed to the plurality of blocks.