IP Library Granted Patent US 8,969,114
Granted Patent B2
US 8,969,114 · App. 14/040,262 · Granted Mar 3, 2015

Method of manufacturing organic light emitting display apparatus

Inventor: Joo-Nyung Jang (Yongin, KR)
Assignee: Samsung Display Co., Ltd.
H01L51/56H01L27/3274H01L51/0011H01L21/6715H01L51/001H01L27/32
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Quick Facts
Patent No.
US 8,969,114
App. No.
14/040,262
Granted
Mar 3, 2015
Kind
B2
Abstract

A method of manufacturing an organic light emitting display apparatus, the method includes loading a substrate on a moving unit, determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction and forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber. The patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate.

Claims (17)

1. A method of manufacturing an organic light emitting display apparatus, the method comprising:

loading a substrate on a moving unit, wherein the moving unit is configured to move along a first direction;

determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, wherein the side of the substrate and the opening in a patterning slit sheet extends substantially along the first direction;

rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction, a first X motor of the two X motors configured to move the patterning slit sheet in one predetermined direction and a second X motor of the two X motors configured to move the patterning slit sheet in the other predetermined direction opposite to the one predetermined direction while rotating the patterning slit sheet, the first X motor and the second X motor configured to move the patterning slit sheet by the same distance;

forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber,

wherein the patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate.

2. The method of claim 1 , wherein the rotating the patterning slit sheet is performed before the substrate overlaps the patterning slit sheet.

3. The method of claim 2 , wherein the patterning slit sheet moves in real time during the forming the layer on the substrate.

4. The method of claim 3 , wherein the two X motors are spaced apart from each other along a virtual straight line in the first direction, the virtual straight line passing through a center of the moving unit.

5. The method of claim 3 , wherein the two X motors are configured to move the patterning slit sheet in a same direction by the same distance during the forming the layer on the substrate, the same direction substantially perpendicular to the first direction.

6. The method of claim 2 , wherein the two X motors are spaced apart from each other along a virtual straight line in the first direction, the virtual straight line passing through a center of the moving unit.

7. The method of claim 2 , wherein the two X motors are configured to move the patterning slit sheet in a same direction by the same distance during the forming the layer on the substrate, the same direction substantially perpendicular to the first direction.

8. The method of claim 1 , wherein the patterning slit sheet moves in real time during the forming the layer on the substrate.

9. The method of claim 8 , the two X motors are spaced apart from each other along a virtual straight line in the first direction, the virtual straight line passing through a center of the moving unit.

10. The method of claim 8 , wherein the two X motors are configured to move the patterning slit sheet in a same direction by the same distance during the forming the layer on the substrate, the same direction substantially perpendicular to the first direction.

11. The method of claim 1 , the two X motors are spaced apart from each other along a virtual straight line in the first direction, the virtual straight line passing through a center of the moving unit.

12. The method of claim 1 , wherein the two X motors are configured to move the patterning slit sheet in a same direction by the same distance during the forming the layer on the substrate, the same direction substantially perpendicular to the first direction.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 27, 2013
From: JANG, JOO-NYUNG
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 031302/0853 →
Priority Claims (1)
KR 10-2013-0063077 · May 31, 2013 · national
Continuity (1)
Related Publication 20140356999A1 · Dec 4, 2014