Gas concentration controller system
The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.
1. A gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration, the gas concentration controller system comprising:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration;
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an on/off valve and a flow rate control part configured to flow the second gas in the exhaust gas line; and
a control part configured to, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, switch on/off the on/off valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.
2. The gas concentration controller system according to claim 1 , wherein the first gas is diluent gas, and the second gas is standard gas.
3. The gas concentration controller system according to claim 1 , wherein
the second gas line has: a plurality of branch lines and the second gas flow rate controlling mechanism is one of a plurality of second gas flow rate controlling mechanisms that are respectively provided on each of the plurality of branch lines; and a line switching mechanism configured to select, from the branch lines, a branch line through which the second gas flows,
flow rate control ranges of the second gas flow rate control mechanism provided in the respective branch lines are configured to be mutually different, and
the exhaust gas line is connected to, among the plurality of branch lines, a branch line that is provided with a second gas flow rate controlling mechanism having a low flow rate range.
4. The gas concentration controller system according to claim 3 , wherein
in a case where, among the plurality of branch lines, the branch line that is provided with the second gas flow rate controlling mechanism having the low flow rate range is selected, the control part is configured to open the on/off valve provided in the exhaust gas line.
5. A gas concentration controller program used for a gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration and is provided with:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration; and
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an on/off valve and a flow rate control part configured to flow the second gas in the exhaust gas line,
the program is configured to instruct a computer to fulfill a function as a control part configured to, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, switch on/off the on/off valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.
6. A gas concentration controller method using a gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration and is provided with:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration; and
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an on/off valve and a flow rate control part configured to flow the second gas in the exhaust gas line, the gas concentration controller method, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, configured to switch on/off the on/off valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.