Semiconductor memory device and method manufacturing semiconductor memory device
View Patent ↗A highly integrated gain cell-type semiconductor memory is provided. A first insulator, a read bit line, a second insulator, a third insulator, a first semiconductor film, first conductive layers, and the like are formed. A projecting insulator is formed thereover. Then, second semiconductor films and a second gate insulating film are formed to cover the projecting insulator. After that, a conductive film is formed and subjected to anisotropic etching, so that write word lines are formed on side surfaces of the projecting insulator. A third contact plug for connection to a write bit line is formed over a top of the projecting insulator. With such a structure, the area of the memory cell can be 4 F 2 at a minimum.
1. A semiconductor memory device comprising a gain cell, the gain cell comprising:
a read bit line formed in or over a substrate;
a projecting insulator formed over the substrate;
a write word line that is formed on a side surface of the projecting insulator and faces with a gate insulator interposed therebetween;
a semiconductor interposed between the write word line and the side surface of the projecting insulator;
an electrode provided over a top of the projecting insulator; and
a write bit line that is provided over the projecting insulator and is electrically connected to the electrode.
2. The semiconductor memory device according to claim 1 ,
wherein a height of the write word line is greater than or equal to 30% and less than or equal to 90% of a height of the projecting insulator.
3. The semiconductor memory device according to any one of claim 1 , further comprising a driver circuit below the read bit line.
4. The semiconductor memory device according to claim 1 ,
wherein the semiconductor includes a material whose band gap is greater than or equal to 2.5 eV and less than or equal to 4 eV.
5. The semiconductor memory device according to claim 1 ,
wherein the semiconductor includes an oxide semiconductor.
6. A semiconductor memory device comprising a gain cell, the gain cell comprising:
a read bit line formed in or over a substrate;
a first conductive layer;
a write word line that is formed over the first conductive layer;
a semiconductor in contact with the first conductive layer;
a first insulator interposed between the write word line and the semiconductor;
a second conductive layer provided over an upper portion of the semiconductor, the second conductive layer being in contact with the semiconductor;
a read word line that is formed on a side surface of the first conductive layer and faces with a second insulator interposed therebetween; and
a write bit line that is provided over the second conductive layer and is electrically connected to the second conductive layer.
7. The semiconductor memory device according to claim 6 ,
wherein the first conductive layer functions as a memory node of the gain cell.
8. The semiconductor memory device according to claim 6 ,
wherein the first insulator is the same material as the second insulator.
9. The semiconductor memory device according to claim 6 , further comprising a driver circuit below the read bit line.
10. The semiconductor memory device according to claim 6 ,
wherein the semiconductor includes a material whose band gap is greater than or equal to 2.5 eV and less than or equal to 4 eV.
11. The semiconductor memory device according to claim 6 ,
wherein the semiconductor includes an oxide semiconductor.
12. A method of manufacturing a semiconductor memory device comprising a gain cell, comprising the steps of:
forming a read bit line in or over a substrate;
forming a conductive layer over the read bit line;
forming a first insulator over the conductive layer;
forming a conductive film;
forming a write word line over the conductive layer; and
forming a read word line on a side surface of the conductive layer by anisotropically etching the conductive film.
13. The method of manufacturing a semiconductor memory device according to claim 12 ,
wherein the write word line is formed at the step of the forming the read word line.
14. The method of manufacturing a semiconductor memory device according to claim 12 , further comprising the step of:
forming a semiconductor over the conductive layer, the semiconductor being in contact with the conductive layer.