IP Library › Granted Patent US 8,975,732
Granted Patent B2
US 8,975,732 · App. 13/799,218 · Granted Mar 10, 2015

Semiconductor device and method of manufacturing the same

Inventors: Akira Tojo (Naka-gun, JP); Kazuhito Higuchi (Yokohama, JP); Tomohiro Iguchi (Kawasaki, JP); Masako Fukumitsu (Yokohama, JP); Daisuke Hiratsuka (Yokohama, JP); Akihiro Sasaki (Tokyo, JP); Masayuki Uchida (Yokohama, JP)
Assignee: Kabushiki Kaisha Toshiba
H01L23/4952H01L21/50H01L23/051H01L23/49844H01L23/5389H01L24/97H01L24/19H01L24/20H01L2924/13055H01L2224/45124H01L2924/00014
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Quick Facts
Patent No.
US 8,975,732
App. No.
13/799,218
Granted
Mar 10, 2015
Kind
B2
Abstract

According to one embodiment, a semiconductor device includes, a chip including a first chip electrode on a first surface on one side, and a second chip electrode on a second surface on the other side, an electrically conductive frame provided on a side periphery of the chip, a rewiring configured to electrically connect the second chip electrode and the electrically conductive frame on the other side of the chip, and an insulation side portion provided between the electrically conductive frame and the side periphery of the chip.

Claims (53)

1. A semiconductor device comprising:

a chip including a first chip electrode on a first surface on one side, and a second chip electrode on a second surface on an other side;

an electrically conductive frame provided on a side periphery of the chip;

a rewiring configured to electrically connect the second chip electrode and the electrically conductive frame on the other side of the chip; and

an insulation side portion provided between the electrically conductive frame and the side periphery of the chip,

wherein an electrical connection from the one side to the second chip electrode is enabled via the electrically conductive frame and the rewiring.

2. The semiconductor device of claim 1 , wherein

the semiconductor device is configured as a semiconductor package device,

a third chip electrode is formed on the second surface of the chip, and

the semiconductor package device includes:

a rewiring configured to electrically connect the third chip electrode and the electrically conductive frame on the other side of the chip; and

an insulation portion provided between a rewiring of the second chip electrode and a rewiring of the third chip electrode,

each of the first to third chip electrodes is any one of a source, a gate and a drain, and

an electrical connection to the first to third chip electrodes is enabled from the one side.

3. The semiconductor device of claim 1 , wherein the rewiring is formed of a plating film.

4. The semiconductor device of claim 1 , wherein the first chip electrode and a part on one side of the electrically conductive frame constitute an external electrode.

5. The semiconductor device of claim 1 , further comprising:

a third chip electrode is formed on the first surface of the chip, wherein

an insulation portion is formed between the first chip electrode and the third chip electrode.

6. The semiconductor device of claim 1 , wherein the rewiring is directly connected to the insulation side portion.

7. A semiconductor device comprising:

a chip including a first chip electrode on a first surface on one side, and a second chip electrode on a second surface on an other side;

an electrically conductive frame provided on a side periphery of the chip;

a rewiring configured to electrically connect the second chip electrode and the electrically conductive frame on the other side of the chip;

an insulation side portion provided between the electrically conductive frame and the side periphery of the chip;

a first rewiring electrode which is electrically connected to the first chip electrode on the one side of the chip and constitutes a first external electrode;

a second rewiring electrode which is electrically connected to the electrically conductive frame on the one side of the chip and constitutes a second external electrode; and

an electrode insulation portion configured to mutually insulate a plurality of said rewiring electrodes on the one side of the chip,

wherein an electrical connection to the first chip electrode is enabled from the one side via the first rewiring electrode, and

an electrical connection to the second chip electrode is enabled from the one side via the second rewiring electrode, the electrically conductive frame and the rewiring.

8. The semiconductor device of claim 7 , wherein at least any one of the rewiring and the rewiring electrodes includes at least two layers, and at least one of the at least two layers includes a seed layer which becomes an adhesive layer.

9. The semiconductor device of claim 7 , wherein an insulation film is formed on at least either a part of the first surface on the one side, which avoids the rewiring electrodes, or the second surface on the other side.

10. A semiconductor device comprising:

a chip including a first chip electrode on a first surface on one side, and a second chip electrode on a second surface on an other side;

an electrically conductive frame provided on a side periphery of the chip;

a rewiring configured to electrically connect the second chip electrode and the electrically conductive frame on the other side of the chip; and

an insulation side portion provided between the electrically conductive frame and the side periphery of the chip, wherein

the semiconductor device is configured as a semiconductor package device,

a third chip electrode is formed on the first surface of the chip,

the semiconductor package device includes a rewiring electrode which is electrically connected to the third chip electrode on the one side of the chip and constitutes an external electrode,

each of the first to third chip electrodes is any one of a source, a gate and a drain, and

an electrical connection to the first to third chip electrodes is enabled from the one side.

11. The semiconductor device of claim 10 , wherein

the electrically conductive frame includes a first frame portion which is connected to the second chip electrode via the rewiring, and a second frame portion which is connected to the third chip electrode via the rewiring, and

the first frame portion and the second frame portion are insulated from each other.

12. A semiconductor device comprising:

a chip including a first chip electrode on a first surface on one side, and a second chip electrode on a second surface on an other side;

an electrically conductive frame provided on a side periphery of the chip;

a rewiring configured to electrically connect the second chip electrode and the electrically conductive frame on the other side of the chip; and

an insulation side portion provided between the electrically conductive frame and the side periphery of the chip, wherein

an electrically conductor member, which is electrically connected to the second chip electrode, is provided on the second surface on the other side of the chip,

the rewiring is formed on a surface on an other side of the electrically conductive member, and

the electrically conductive frame and the rewiring are electrically connected via the electrically conductive member.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 13, 2013
From: TOJO, AKIRA; HIGUCHI, KAZUHITO; IGUCHI, TOMOHIRO; FUKUMITSU, MASAKO; HIRATSUKA, DAISUKE; SASAKI, AKIHIRO; UCHIDA, MASAYUKI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 029984/0674 →
Priority Claims (2)
JP 2012-057781 · Mar 14, 2012 · national
JP 2013-006553 · Jan 17, 2013 · national
Continuity (1)
Related Publication 20130241040A1 · Sep 19, 2013