MEMS proof mass with split z-axis portions

1. A proof-mass for an accelerometer, the proof mass comprising:

a center portion configured to anchor the proof-mass to an adjacent layer;

a first z-axis portion of the proof mass configured to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis;

a second z-axis portion of the proof mass configured to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane;

wherein the first z-axis portion is configured to rotate independent of the second z-axis portion; and

wherein the central portion includes an anchor portion and an x-axis proof mass portion, the x-axis proof mass portion configured to deflect, with respect to the anchor portion, in response to an acceleration of the proof mass along the x-axis.

2. The proof mass of claim 1 , wherein the first z-axis portion is configured to rotate in an opposite direction than that of the second z-axis portion in response to an acceleration of the proof mass along the z-axis.

3. The proof mass of claim 1 , wherein the first hinge is located opposite the second hinge with respect to the central portion.

4. The proof mass of claim 1 , wherein the first hinge is coupled to the first z-axis portion closer to a first end of the first z-axis portion than a second end of the first z-axis portion.

5. The proof mass of claim 1 , wherein the second hinge is coupled to the second z-axis portion closer to a first end of the second z-axis portion than a second end of the axis z-axis portion.

6. The proof mass of claim 1 , including a third hinge, wherein the first z-axis portion is configured to rotate about the first axis in the x-y plane using the first hinge and the third hinge.

7. The proof mass of claim 1 , including a fourth hinge, wherein the second z-axis portion is configured to rotate about the second axis in the x-y plane using the second hinge and the fourth hinge.

8. The proof mass of claim 1 , wherein the central portion includes a y-axis proof mass portion, the y-axis proof mass portion configured to deflect, with respect to the anchor portion, in response to an acceleration of the proof mass along the y-axis.

9. The proof mass of claim 1 wherein the first z-axis portion and the second z-axis portion substantially envelop the central portion in the x-y-plane.

10. An apparatus comprising:

a single proof mass accelerometer, the single proof mass accelerometer including:

a proof mass structure formed in the x-y plane of a device layer, the proof mass structure including:

a central portion including:

a single, central anchor, configured to suspend the proof mass structure ; and

separate x and y, flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor;

a first z-axis portion configured to rotate about a first axis in the x-y plane using a first hinge, the first hinge coupled to the central portion;

a second z-axis portion configure to rotate about a second axis in the x-y plane using a second hinge, the second hinge coupled to the central portion;

wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.

11. The apparatus of claim 10 , wherein the central portion includes in-plane x and y-axis accelerometer sense electrodes symmetrical about the single, central anchor.

12. The apparatus of claim 10 , wherein the proof mass structure includes:

a first portion of first and second out-of-plane z-axis accelerometer sense electrodes coupled to the first z-axis portion, and

a first portion of third and fourth out-of-plane z-axis sense electrodes coupled to the second z-axis portion.

13. The apparatus of claim 12 , including:

a cap wafer bonded to a first surface of the device layer; and

a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof mass accelerometer in a cavity.

14. The apparatus of claim 13 , wherein the via wafer includes:

a second portion of the first and second out-of-plane z-axis accelerometer sense electrodes, and

a second portion of the third and fourth out-of-plane z-axis sense electrodes.

15. The apparatus of claim 14 , including a first portion of x-axis accelerometer electrodes coupled to the device layer, and

wherein the central portion of the proof mass structure includes a second portion of the x-axis accelerometer electrodes, the second portion of the x-axis accelerometer electrodes coupled to the single central anchor using the x flexure bearings.

16. The apparatus of claim 14 , including a first portion of y-axis accelerometer electrodes coupled to the device layer, and

wherein the central portion of the proof mass structure includes a second portion of the y-axis accelerometer electrodes, the second portion of the y-axis accelerometer electrodes coupled to the single central anchor using the y flexure bearings.

17. The apparatus of claim 13 , including a multiple-axis gyroscope within the cavity and adjacent the single proof mass accelerometer, the multiple-axis gyroscope including:

a single gyroscope proof mass formed in the x-y plane of the device layer, the single gyroscope proof mass including:

a main proof-mass section suspended about a second single, central anchor, the main proof-mass section extending outward towards an edge of the multiple-axis gyroscope;

a central suspension system configured to suspend the single gyroscope proof mass from the single, central anchor; and

a drive electrode including a moving portion and a stationary portion, the moving portion including a first set of fingers interdigitated with a second set of fingers of the stationary portion, wherein the drive electrode and the central suspension system are configured to oscillate the single gyroscope proof mass about the z-axis normal to the x-y plane at a drive frequency.

18. The apparatus of claim 17 , wherein the single gyroscope proof mass includes symmetrical x-axis proof-mass sections configured to move anti-phase along the x-axis in response to z-axis angular motion.