Electrostatic chuck apparatus
Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater.
1. An electrostatic chuck apparatus comprising:
an electrostatic chuck section, one main surface of which is a placing surface for placing a plate-like specimen, and which is equipped with an internal electrode for electrostatic adsorption;
an annular focus ring section which is provided so as to surround the electrostatic chuck section;
a cooling base section which is provided on the other main surface side of the electrode chuck section to cool the electrostatic chuck section and the focus ring section,
wherein the focus ring section includes an annular focus ring, an annular thermal conducting sheet which is adhered to a lower surface of the focus ring, an annular ceramic plate which is adhered to a lower surface of the thermal conducting sheet, a sheet-like heater portion which is provided between the ceramic plate and the cooling base section and is formed from a non-magnetic body, and an electrode section which supplies electricity to a heater section, and
the heater section is fixed to the ceramic plate by a first insulating adhesive layer, is fixed to the cooling base section by a second insulating adhesive layer, and is insulated by the first insulating adhesive layer and the second insulating adhesive layer.
2. The electrostatic chuck apparatus according to claim 1 ,
wherein the ceramic plate is constituted by a plurality of annular ceramic pieces which is formed by dividing the annular ceramic plate in a radial direction.
3. The electrostatic chuck apparatus according to claim 1 , wherein an insulating ceramic membrane or an insulating organic film is provided between the cooling base section and the heater section.
4. The electrostatic chuck apparatus according to claim 1 , wherein temperature measuring means is provided in the focus ring section.
5. The electrostatic chuck apparatus according to claim 1 , wherein the heater section has an electrical conductivity of 0.5×10 6 S/m or more and 20×10 6 S/m or less, and a coefficient of thermal expansion of 0.1×10 −6 /K or more and 100×10 −6 /K or less.
6. The electrostatic chuck apparatus according to claim 1 , wherein the heater section is formed from titanium or titanium alloy.
7. The electrostatic chuck apparatus according to claim 1 , wherein the ceramic plate has insulating properties and has thermal conductivity of 1 W/mK or more.
8. The electrostatic chuck apparatus according to claim 1 , wherein the coefficient of heat transfer between the heater section and the cooling base section is 400 W/m 2 K or more and 10,000 W/m 2 K or less.
9. The electrostatic chuck apparatus according to claim 1 , wherein the coefficient of heater transfer of the thermal conducting sheet is equal to or greater than 500 W/m 2 K.
10. The electrostatic chuck apparatus according to claim 1 , wherein the insulating adhesive layer contains a filler.
11. An electrostatic chuck apparatus comprising:
an electrostatic chuck section, one main surface of which is a placing surface for electrostatic adsorption of a plate-like specimen, and which is equipped with an internal electrode for electrostatic adsorption;
an annular focus ring section which is provided so as to surround the electrostatic chuck section; and
a cooling base section which is provided on the other main surface side of the electrode chuck section to cool the electrostatic chuck section and the focus ring section,
wherein the focus ring section includes a focus ring, a ceramic plate which is provided between the focus ring and the cooling base section, a heater section which is provided between the ceramic plate and the cooling base section and is formed from a non-magnetic body, and an electrode section which supplies electricity to the heater section; and
the ceramic plate is constituted by a plurality of annular ceramic pieces which is formed by dividing the annular ceramic plate in a radial direction.