Non-volatile memory device using finfet and method for manufacturing the same
The present application discloses a non-volatile memory device, comprising a semiconductor fin on an insulating layer; a channel region at a central portion of the semiconductor fin; source/drain regions on both sides of the semiconductor fin; a floating gate arranged at a first side of the semiconductor fin and extending in a direction further away from the semiconductor fin; and a first control gate arranged on top of the floating gate or covering top and sidewall portions of the floating gate. The non-volatile memory device reduces a short channel effect, has an increased memory density, and is cost effective.
1. A non-volatile memory device, comprising:
An insulating layer;
a semiconductor fin on the insulating layer, the semiconductor fin having a central portion and two opposing sides, a first side and a second side;
a channel region at the central portion of the semiconductor fin;
source/drain regions on both sides of the semiconductor fin;
a floating gate having a top and sidewall portions arranged at the first side of the semiconductor fin and extending in a direction further away from the semiconductor fin;
a first control gate arranged on top of the floating gate or covering top and sidewall portions of the floating gate; and
a second control gate arranged at a second side opposite to the first side of the semiconductor fin and extending in a direction further away from the semiconductor fin.
2. The non-volatile memory device according to claim 1 , wherein the semiconductor fin is a silicon fin.
3. The non-volatile memory device according to claim 1 , wherein the floating gate comprises a floating gate dielectric layer and a floating gate conductor, and the floating gate conductor is insulated from the semiconductor fin by the floating gate dielectric layer.
4. The non-volatile memory device according to claim 3 , wherein the floating gate conductor is a stack of a barrier layer and an floating gate conductive layer, and the barrier layer is sandwiched between the floating gate conductive layer and the floating gate dielectric layer.
5. The non-volatile memory device according to claim 1 , wherein the first control gate comprises an intermediate dielectric layer and a first control gate conductor.
6. The non-volatile memory device according to claim 5 , wherein the first control gate conductor is made of at least one selected from a group comprising metals, doped polysilicon, and conductive nitride.
7. The non-volatile memory device according to claim 6 , wherein the first control gate conductor is a stack of a barrier layer and an control gate conductive layer, and the barrier layer is sandwiched between the control gate conductive layer and the intermediate dielectric layer.
8. The non-volatile memory device according to claim 1 , wherein the insulating layer is a buried insulating layer of an SOI wafer.
9. The non-volatile memory device according to claim 8 , wherein the semiconductor fin is formed by a top semiconductor layer of the SOI wafer.
10. The non-volatile memory device according to claim 1 , wherein the second control gate and the floating gate are made of the same dielectric material and conductive material.
11. The non-volatile memory device according to claim 2 , further comprising:
a second control gate arranged at a second side opposite to the first side of the semiconductor fin and extending in a direction further away from the semiconductor fin.