IP Library Granted Patent US 9,006,908
Granted Patent B2
US 9,006,908 · App. 13/955,386 · Granted Apr 14, 2015

Integrated circuit interposer and method of manufacturing the same

Inventors: Carol Pincu (Rison Leziyon, IL); Ido Bourstein (Karkur, IL)
Assignee: Marvell Israel (M.I.S.L) Ltd.
H01L25/0655H01L23/147H01L23/5385H01L2924/15311H01L2224/16225H01L2924/15192H01L2924/157
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Quick Facts
Patent No.
US 9,006,908
App. No.
13/955,386
Granted
Apr 14, 2015
Kind
B2
Abstract

Systems and methods are provided for an interposer for coupling two or more integrated circuit dies to a circuit package. A first integrated circuit portion is disposed on a first location of a single semiconductor substrate. A second integrated circuit portion is disposed on a second location of the single semiconductor substrate, where the second integrated circuit portion is electrically isolated from the first integrated circuit portion along a first axis. The first and second integrated circuit portions are configured to provide an electrical coupling to two or more corresponding top die integrated circuits across a second axis that is perpendicular to the first axis.

Claims (21)

1. An interposer for coupling two or more integrated circuit dies to a circuit package, comprising:

a first integrated circuit portion disposed on a first location of a single semiconductor substrate; and

a second integrated circuit portion disposed on a second location of the single semiconductor substrate, the second integrated circuit portion being electrically isolated from the first integrated circuit portion by a first axis that extends between the first and second integrated circuit portions,

the first and second integrated circuit portions being configured to provide an electrical coupling to two or more top die integrated circuits, wherein the first and second integrated circuit portions each include patterns of electrical connections that electrically connect a first top die integrated circuit with a second top die integrated circuit, the patterns spanning a second axis that is perpendicular to the first axis.

2. The interposer of claim 1 , wherein a size of each of the first and second integrated circuit portions corresponds to a reticle size of one or more reticle masks that are used to fabricate the first integrated circuit portion and second integrated circuit portion respectively.

3. The interposer of claim 1 , wherein a combined size of the first integrated circuit portion and the second integrated circuit portion is larger than a reticle size of a reticle mask that is used to fabricate the first integrated circuit portion and the second integrated circuit portion.

4. The interposer of claim 1 , wherein at least some of the patterns of electrical connections extend in a direction parallel to the first axis.

5. The interposer of claim 1 , wherein the first integrated circuit portion and the second integrated circuit portion are formed from neighboring, but un-scribed, reticle locations on a semiconductor wafer substrate.

6. The interposer of claim 1 , wherein the first integrated circuit portion is electrically isolated from the second integrated circuit portion by seal rings that extend along the first axis between the first integrated circuit portion and the second integrated circuit portion.

7. The interposer of claim 6 , wherein a first seal ring surrounds the first integrated circuit portion, and a second seal ring surrounds the second integrated circuit portion, wherein the first seal ring and the second seal ring are separated by a space.

8. The interposer of claim 1 , wherein the first integrated circuit portion and the second integrated circuit portion each include the same pattern of electrical connections for electrically connecting the two or more corresponding top die integrated circuits.

9. The interposer of claim 1 , wherein the first integrated circuit portion and the second integrated circuit portion each include a different patterns of electrical connections for electrically connecting the two or more corresponding top die integrated circuits.

10. The interposer of claim 1 , wherein the first axis comprises a double seal ring that is formed over an uncut scribe line of a semiconductor wafer substrate, the first and second integrated circuit portions being formed at neighboring reticle locations of the semiconductor wafer substrate.

11. The interposer of claim 10 , wherein the neighboring, reticle locations of the semiconductor wafer substrate are separated from each other by the double seal ring.

12. The interposer of claim 10 , wherein the double seal ring includes a first seal ring that surrounds the first integrated circuit portion and a second seal ring that surrounds the second integrated circuit portion, and wherein the first seal ring and the second seal ring are separated by silicon.

13. An integrated circuit package, comprising:

an interposer that includes a first integrated circuit portion disposed on a first location of a single semiconductor substrate and a second integrated circuit portion disposed on a second location of the single semiconductor substrate, wherein the second integrated circuit portion is electrically isolated from the first integrated circuit portion by an isolation axis that extends between the first and second integrated circuit portions; and

two or more integrated circuit dies electrically coupled to the first and second integrated circuit portions of the interposer across a second axis that is perpendicular to the isolation axis, wherein the first and second integrated circuit portions of the interposer each include patterns of electrical connections that electrically connect a first of the two or more integrated circuit dies with a second of the two or more integrated circuit dies, the patterns extending between the two or more integrated circuit dies in a direction parallel to the isolation axis.

14. The integrated circuit package of claim 13 , wherein the isolation axis comprises a double seal ring that is formed over an uncut scribe line of a semiconductor wafer substrate, the first and second integrated circuit portions being formed at neighboring reticle locations of the semiconductor wafer substrate.

15. The integrated circuit package of claim 14 , wherein the neighboring reticle locations of the semiconductor wafer substrate are separated from each other by the double seal ring.

16. The integrated circuit package of claim 14 , wherein the double seal ring includes a first seal ring that surrounds the first integrated circuit portion and a second seal ring that surrounds the second integrated circuit portion, and wherein the first seal ring and the second seal ring are separated by silicon.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2013
From: PINCU, CAROL; BOURSTEIN, IDO
To: MARVELL ISRAEL (M.I.S.L) LTD.
Reel/Frame 030997/0330 →
Continuity (4)
Provisional Application 61678506 · Aug 1, 2012
Provisional Application 61694151 · Aug 28, 2012
Provisional Application 61731975 · Nov 30, 2012
Related Publication 20140035093A1 · Feb 6, 2014