Semiconductor device
An object of the present invention is to provide a semiconductor device in which stored data can be held even when power is not supplied for a certain time. Another object is to increase the degree of integration of a semiconductor device and to increase the storage capacity per unit area. A semiconductor device is formed with a material capable of sufficiently reducing off-state current of a transistor, such as an oxide semiconductor material that is a wide-bandgap semiconductor. With the use of a semiconductor material capable of sufficiently reducing off-state current of a transistor, the semiconductor device can hold data for a long time. Furthermore, a wiring layer provided under a transistor, a high-resistance region in an oxide semiconductor film, and a source electrode are used to form a capacitor, thereby reducing the area occupied by the transistor and the capacitor.
1. A semiconductor device comprising:
a transistor; and
a capacitor,
wherein the transistor comprises:
an oxide semiconductor film comprising:
a channel formation region;
a pair of first regions; and
a pair of second regions over the pair of first regions,
a source electrode layer and a drain electrode layer over the pair of second regions;
a gate electrode layer over the oxide semiconductor film; and
a gate insulating film between the oxide semiconductor film and the gate electrode layer,
wherein the capacitor comprises:
a wiring layer;
one of the pair of first regions over the wiring layer;
one of the pair of second regions over the one of the pair of first regions; and
the source electrode layer over the one of the pair of second regions,
wherein a resistance value of the pair of first regions is higher than a resistance value of the pair of second regions, and
wherein the pair of second regions comprises at least one of aluminum, titanium, molybdenum, tungsten, hafnium, tantalum, lanthanum, barium, magnesium, zirconium, and nickel.
2. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film further comprises a pair of third regions,
wherein one of the pair of third regions is provided between the channel formation region and one of the pair of second regions, and the other of the pair of third regions is provided between the channel formation region and the other of the pair of second regions, and
wherein the pair of third regions comprises phosphorus or boron.
3. The semiconductor device according to claim 1 , further comprising a sidewall insulating film provided to be in contact with a side surface of the gate electrode layer.
4. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from rare earth elements.
5. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from zirconium, gadolinium, cerium, and titanium.
6. A semiconductor device comprising:
a transistor; and
a capacitor,
wherein the transistor comprises:
an oxide semiconductor film comprising:
a channel formation region;
a pair of first regions; and
a pair of second regions over the pair of first regions,
a source electrode layer and a drain electrode layer over the pair of second regions;
a gate electrode layer over the oxide semiconductor film; and
a gate insulating film between the oxide semiconductor film and the gate electrode layer,
wherein the capacitor comprises:
a wiring layer;
one of the pair of first regions over the wiring layer;
one of the pair of second regions over the one of the pair of first regions; and
the source electrode layer over the one of the pair of second regions,
wherein a resistance value of the pair of first regions is higher than a resistance value of the pair of second regions,
wherein the pair of second regions comprises at least one of aluminum, titanium, molybdenum, tungsten, hafnium, tantalum, lanthanum, barium, magnesium, zirconium, and nickel, and
wherein off-state current per micrometer of a channel width of the transistor is 1×10 −19 A/μm or less.
7. The semiconductor device according to claim 6 ,
wherein the oxide semiconductor film further comprises a pair of third regions,
wherein one of the pair of third regions is provided between the channel formation region and one of the pair of second regions, and the other of the pair of third regions is provided between the channel formation region and the other of the pair of second regions, and
wherein the pair of third regions comprises phosphorus or boron.
8. The semiconductor device according to claim 6 , further comprising a sidewall insulating film provided to be in contact with a side surface of the gate electrode layer.
9. The semiconductor device according to claim 6 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from rare earth elements.
10. The semiconductor device according to claim 6 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from zirconium, gadolinium, cerium, and titanium.
11. A semiconductor device comprising:
a transistor; and
a capacitor,
wherein the transistor comprises:
an oxide semiconductor film comprising:
a channel formation region;
a pair of first regions; and
a pair of second regions over the pair of first regions,
a source electrode layer and a drain electrode layer over the pair of second regions;
a gate electrode layer over the oxide semiconductor film; and
a gate insulating film between the oxide semiconductor film and the gate electrode layer,
wherein the capacitor comprises:
a wiring layer embedded in an insulating film;
one of the pair of first regions over the wiring layer;
one of the pair of second regions over the one of the pair of first regions; and
the source electrode layer over the one of the pair of second regions,
wherein a resistance value of the pair of first regions is higher than a resistance value of the pair of second regions,
wherein the pair of second regions comprises at least one of aluminum, titanium, molybdenum, tungsten, hafnium, tantalum, lanthanum, barium, magnesium, zirconium, and nickel, and
wherein a bottom surface of one of the pair of first regions is in contact with the wiring layer and the insulating film.
12. The semiconductor device according to claim 11 ,
wherein the oxide semiconductor film further comprises a pair of third regions,
wherein one of the pair of third regions is provided between the channel formation region and one of the pair of second regions, and the other of the pair of third regions is provided between the channel formation region and the other of the pair of second regions, and
wherein the pair of third regions comprises phosphorus or boron.
13. The semiconductor device according to claim 11 , further comprising a sidewall insulating film provided to be in contact with a side surface of the gate electrode layer.
14. The semiconductor device according to claim 11 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from rare earth elements.
15. The semiconductor device according to claim 11 ,
wherein the oxide semiconductor film comprises indium, zinc, and at least one selected from zirconium, gadolinium, cerium, and titanium.