Semiconductor device having a stack structure including a stoichiometric material and a non-stoichiometric material, and method for fabricating the same
A method for fabricating a semiconductor device includes forming an impurity layer over a first conductive layer; forming a first metal oxide layer over the impurity layer, wherein the first metal oxide layer includes oxygen at a lower ratio than a stoichiometric ratio; diffusing an impurity from the impurity layer into the first metal oxide layer to form a first doped metal oxide layer; forming a second metal oxide layer over the first doped metal oxide layer; and forming a second conductive layer over the second metal oxide layer.
1. A semiconductor device comprising:
a first conductive layer;
a doped silicon layer disposed over the first conductive laver;
a first metal oxide layer disposed over the doped silicon layer, the first metal oxide layer doped with an impurity diffused from the doped silicon layer, wherein the first metal oxide layer includes oxygen at a lower ratio than a stoichiometric ratio;
a second metal oxide layer disposed over the first metal oxide layer; and
a second conductive layer disposed over the second metal oxide layer,
wherein the impurity of the first metal oxide layer is the same as an impurity of the doped silicon layer.
2. The semiconductor device of claim 1 , wherein concentration of the impurity in the first metal oxide layer decreases as a distance from the first conductive layer increases.
3. The semiconductor device of claim 1 , wherein the second metal oxide layer satisfies a stoichiometric ratio.
4. The semiconductor device of claim 1 , wherein the impurity includes at least one of arsenide, phosphorus, boron, nitrogen, germanium, titanium, and tantalum.
5. The semiconductor device of claim 1 , wherein the second metal oxide layer has a resistance value higher than a resistance value of the first metal oxide layer.
6. The semiconductor device of claim 1 , wherein the first conductive layer extends in a first direction, and
wherein the second conductive layer extends in a second direction that crosses the first conductive layer.
7. The semiconductor device of claim 1 , wherein the doped silicon layer is disposed directly on the first metal oxide layer, and
wherein the second metal oxide layer satisfies a stoichiometric ratio.
8. The semiconductor device of claim 1 , wherein the impurity includes any of arsenide, phosphorus, boron, nitrogen, germanium, tantalum, and a combination thereof.
9. A semiconductor device, comprising:
a first conductive layer;
a first metal oxide layer disposed over the first conductive layer;
a second metal oxide layer which includes oxygen at a lower ratio than a stoichiometric ratio and is disposed over the first metal oxide layer;
a second conductive layer disposed over the second metal oxide layer;
a third metal oxide layer doped with an impurity, wherein the third metal oxide layer includes oxygen at a lower ratio than a stoichiometric ratio and is disposed over the second conductive layer;
a fourth metal oxide layer disposed over the third metal oxide layer; and
a third conductive layer disposed over the fourth metal oxide layer,
wherein the first and the fourth metal oxide layers satisfy a stoichiometric ratio.
10. The semiconductor device of claim 9 , wherein concentration of the impurity decreases as a distance from the second conductive layer increases.
11. The semiconductor device of claim 9 , further comprising:
a doped silicon layer which is provided between the second conductive layer and the third metal oxide layer.
12. The semiconductor device of claim 9 , wherein the impurity includes at least one of arsenide, phosphorus, boron, nitrogen, germanium, titanium, and tantalum.
13. The semiconductor device of claim 9 , wherein the first metal oxide layer has a resistance value that is higher than a resistance value of the second metal oxide layer, and
wherein the fourth metal oxide layer has a resistance value that is higher than a resistance value of the third metal oxide layer.
14. The semiconductor device of claim 9 , wherein the second conductive layer extends in a first direction, and
wherein the first and the third conductive layers extend in a second direction that crosses the second conductive layer.
15. The semiconductor device of claim 9 , wherein the second metal oxide layer is doped with an impurity.
16. A semiconductor device, comprising:
a first electrode layer;
a doped silicon layer disposed over the first electrode layer;
a non-stoichiometric material layer which is doped with an impurity diffused from the doped silicon layer and is disposed over the doped silicon layer;
a stoichiometric material layer disposed over the non-stoichiometric material layer; and
a second electrode layer disposed over the stoichiometric material layer,
wherein the impurity of the non-stoichiometric material layer is the same as an impurity of the doped silicon layer.
17. The semiconductor device of claim 16 ,
wherein a resistance value of the stoichiometric material layer is higher than a resistance value of the non-stoichiometric material layer.
18. The semiconductor device of claim 16 , wherein each of the non-stoichiometric material layer and the stoichiometric material layer includes (i) a Perovskite material, (ii) a transition metal oxide (TMO), or (iii) both, and
wherein the transition metal oxide (TMO) includes titanium (Ti) oxide, hafnium (Hf) oxide, zirconium (Zr) oxide, aluminum (Al) oxide, tantalum (Ta) oxide, niobium (Nb) oxide, cobalt (Co) oxide, nickel (Ni) oxide, tungsten (W) oxide, and lanthanum (La) oxide, or a combination thereof.