Gyro sensor and electronic device
A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view.
1. A gyro sensor comprising:
a first mass portion including a first detection portion;
a second mass portion including a second detection portion;
a first drive portion vibrating the first mass portion in a direction of a first axis; and
a force conversion portion fixed to an anchor portion, wherein
the first mass portion and the second mass portion are connected with the force conversion portion,
the force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plan view,
the force conversion portion includes:
a rotating body;
an anchor beam connecting the anchor portion with the rotating body;
a first connection beam connecting the rotating body with the first mass portion; and
a second connection beam connecting the rotating body with the second mass portion, and
the rotating body has rigidity higher than that of the anchor beam.
2. The gyro sensor according to claim 1 , wherein
the anchor beam includes
a first anchor beam extending from the anchor portion in the direction of the first axis, and
a second anchor beam extending from the anchor portion in the direction of the second axis, and
the rotating body is a beam connecting an end of the first anchor beam with an end of the second anchor beam.
3. The gyro sensor according to claim 2 , wherein
the rotating body is disposed in an arc shape.
4. The gyro sensor according to claim 1 , wherein
the rotating body has a cavity, and
the anchor portion is arranged in the inside of the cavity.
5. The gyro sensor according to claim 1 , wherein
a set of the anchor portions are disposed with the rotating body interposed therebetween.
6. The gyro sensor according to claim 5 , wherein
the rotating body has a rectangle shape.
7. The gyro sensor according to claim 1 , further comprising:
a third mass portion facing the first mass portion on the first axis and including a third detection portion; and
a second drive portion vibrating the third mass portion in the direction of the first axis opposite to the first mass portion, wherein
the force conversion portion is connected between the second mass portion and the third mass portion, and uses vibrations of the first mass portion and the third mass portion in the direction of the first axis to vibrate the second mass portion in the direction of the second axis.
8. The gyro sensor according to claim 7 , further comprising:
a fourth mass portion facing the second mass portion on the second axis and including a fourth detection portion, wherein
the force conversion portion is connected between the third mass portion and the fourth mass portion, and between the first mass portion and the fourth mass portion, and
the force conversion portion uses vibrations of the first mass portion and the third mass portion in the direction of the first axis to vibrate the second mass portion in the direction of the second axis and vibrate the fourth mass portion in the direction of the second axis opposite to the second mass portion.
9. An electronic device comprising:
a display device that displays an image;
an input member that inputs information; and
a casing on which the display device and the input member are provided, the casing housing the gyro sensor according to claim 1 .