IP Library Granted Patent US 9,040,340
Granted Patent B2
US 9,040,340 · App. 13/295,511 · Granted May 26, 2015

Temperature grading for band gap engineering of photovoltaic devices

Inventors: Ahmed Abou-Kandil (Elmsford, NY); Keith E. Fogel (Hopewell Junction, NY); Augustin J. Hong (White Plains, NY); Jeehwan Kim (Los Angeles, CA); Mohamed Saad (White Plains, NY); Devendra K. Sadana (Pleasantville, NY)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
H01L31/075H01L27/14692H01L31/202Y02E10/548
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,040,340
App. No.
13/295,511
Granted
May 26, 2015
Kind
B2
Abstract

A method for fabricating a photovoltaic device includes depositing a p-type layer at a first temperature and depositing an intrinsic layer while gradually increasing a deposition temperature to a final temperature. The intrinsic layer deposition is completed at the final temperature. An n-type layer is formed on the intrinsic layer.

Claims (38)

1. A method for fabricating a photovoltaic device, comprising:

depositing a p-type layer at a first temperature;

depositing an intrinsic layer directly on the p-type layer while continuously increasing a deposition temperature to a final temperature, including forming a band gap alignment region at an interface between the p-type layer and the intrinsic layer such that band gap energy includes a continuous transition;

completing the intrinsic layer at the final temperature; and

forming an n-type layer directly on the intrinsic layer.

2. The method as recited in claim 1 , wherein the p-type layer, the intrinsic layer and the n-type layer include amorphous silicon or an amorphous compound including silicon.

3. The method as recited in claim 1 , wherein the first temperature includes about 200 degrees Celsius and the final temperature includes about 250 degrees Celsius.

4. The method as recited in claim 1 , wherein continuously increasing a deposition temperature includes a linear increase in a temperature profile.

5. The method as recited in claim 1 , wherein completing the p-type layer includes isolating a p-type dopant source.

6. The method as recited in claim 1 , wherein the band gap alignment region is free of discontinuous band gap energy barriers.

7. The method as recited in claim 1 , further comprising providing a degradation efficiency that is less than a degradation efficiency provided by including carbon at an interface between the p-type layer and the intrinsic layer.

8. The method as recited in claim 1 , wherein a difference between the first temperature and the final temperature is between about 50 to about 80 degrees Celsius.

9. A method for fabricating a photovoltaic device, comprising:

providing an electrode;

depositing a p-type layer at a first temperature on the electrode;

isolating a dopant source to complete the p-type layer;

forming an intrinsic layer directly on the p-type layer while continuously increasing a deposition temperature;

continuing to continuously increase the deposition temperature to a final temperature to complete the intrinsic layer wherein a difference between the first temperature and the final temperature is between about 50 to about 80 degrees Celsius; and

forming an n-type layer directly on the intrinsic layer.

10. The method as recited in claim 9 , wherein the p-type layer, the intrinsic layer and the n-type layer include amorphous silicon or an amorphous compound including silicon.

11. The method as recited in claim 9 , wherein the first temperature includes about 200 degrees Celsius and the final temperature includes about 250 degrees Celsius.

12. The method as recited in claim 9 , wherein continuously increasing a deposition temperature includes a linear increase in a temperature profile.

13. The method as recited in claim 9 , wherein continuously increasing a deposition temperature includes forming a band gap alignment region between the p-type layer and the intrinsic layer such that band gap energy includes a continuous transition between the p-type layer and the intrinsic layer.

14. The method as recited in claim 13 , wherein the band gap alignment region is free of discontinuous band gap energy barriers between the p-type layer and the intrinsic layer.

15. The method as recited in claim 9 , further comprising providing a degradation efficiency that is less than a degradation efficiency provided by including carbon at an interface between the p-type layer and the intrinsic layer.

16. The method as recited in claim 9 , wherein providing an electrode includes forming one of a transparent conductive electrode or a metal electrode.

17. A method for fabricating a photovoltaic device, comprising:

depositing a p-type layer at a first temperature;

depositing an intrinsic layer directly on the p-type layer while continuously and linearly increasing a deposition temperature to a final temperature;

completing the intrinsic layer at the final temperature; and

forming an n-type layer directly on the intrinsic layer.

18. The method as recited in claim 17 , wherein the p-type layer, the intrinsic layer and the n-type layer include amorphous silicon or an amorphous compound including silicon.

19. The method as recited in claim 17 , wherein the first temperature includes about 200 degrees Celsius and the final temperature includes about 250 degrees Celsius.

20. The method as recited in claim 17 , wherein completing the p-type layer includes isolating a p-type dopant source.

21. The method as recited in claim 17 , further comprising providing a degradation efficiency that is less than a degradation efficiency provided by including carbon at an interface between the p-type layer and the intrinsic layer.

22. The method as recited in claim 17 , wherein a difference between the first temperature and the final temperature is between about 50 to about 80 degrees Celsius.

23. The method as recited in claim 17 , wherein gradually increasing a deposition temperature includes forming a band gap alignment region at an interface between the p-type layer and the intrinsic layer such that band gap energy includes a gradual transition.

24. The method as recited in claim 23 , wherein the band gap alignment region is free of discontinuous barriers.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 17, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: INTERNATIONAL BUSINESS MACHINES CORPORATION; EGYPT NANOTECHNOLOGY CENTER (EGNC)
Reel/Frame 037057/0605 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2011
From: ABOU-KANDIL, AHMED; FOGEL, KEITH E.; HONG, AUGUSTIN J.; KIM, JEEHWAN; SAAD, MOHAMED; SADANA, DEVENDRA K.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 027221/0613 →
Continuity (1)
Related Publication 20130118565A1 · May 16, 2013