IP Library › Granted Patent US 9,043,740
Granted Patent B2
US 9,043,740 · App. 14/048,918 · Granted May 26, 2015

Fabrication of a magnetic tunnel junction device

Inventors: Kangho Lee (San Diego, CA); Xiaochun Zhu (San Diego, CA); Xia Li (San Diego, CA); Seung Hyuk Kang (San Diego, CA)
Assignee: QUALCOMM Incorporated
H01L43/02B82Y25/00B82Y40/00G06F17/5068H01F10/3254H01F41/309H01F41/32H01L27/228H01L43/08H01L43/12H01F10/329
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Quick Facts
Patent No.
US 9,043,740
App. No.
14/048,918
Granted
May 26, 2015
Kind
B2
Abstract

A magnetic tunneling junction device and fabrication method is disclosed. In a particular embodiment, a non-transitory computer-readable medium includes processor executable instructions. The instructions, when executed by a processor, cause the processor to initiate deposition of a capping material on a free layer of a magnetic tunneling junction structure to form a capping layer. The instructions, when executed by the processor, cause the processor to initiate oxidization of a first layer of the capping material to form a first oxidized layer of oxidized material.

Claims (30)

1. A non-transitory computer-readable medium comprising processor executable instructions that, when executed by a processor, cause the processor to:

initiate deposition of a capping material on a free layer of a magnetic tunneling junction structure to form a capping layer; and

initiate formation of a first oxidized layer of oxidized material on the capping layer, wherein the first oxidized layer is positioned further from the free layer than a second layer of the capping material.

2. The non-transitory computer-readable medium of claim 1 , wherein the capping material includes magnesium.

3. The non-transitory computer-readable medium of claim 1 , wherein oxidizing the first layer of the capping material reduces a spin pumping effect of the free layer.

4. The non-transitory computer-readable medium of claim 1 , wherein the first oxidized layer is separated from the free layer by the second layer.

5. The non-transitory computer-readable medium of claim 1 , wherein the second layer includes a graded layer.

6. The non-transitory computer-readable medium of claim 5 , wherein the graded layer comprises a substantially non-magnetic material and an oxide of the substantially non-magnetic material.

7. The non-transitory computer-readable medium of claim 1 , wherein a barrier layer is adjacent to a first side of the free layer and the capping layer is adjacent to a second side of the free layer, the second side opposite to the first side.

8. The non-transitory computer-readable medium of claim 1 , wherein the capping layer includes a buffer layer, wherein the buffer layer is positioned intermediate to the first layer and the free layer.

9. The non-transitory computer-readable medium of claim 1 , wherein the free layer and the capping layer are included in a semiconductor device fabricated according to design information included in a data file, and wherein the capping layer includes the first oxidized layer.

10. The non-transitory computer-readable medium of claim 9 , wherein the processor executable instructions further cause the processor to receive the data file.

11. The non-transitory computer-readable medium of claim 9 , wherein the data file has a GDSII format.

12. The non-transitory computer-readable medium of claim 9 , wherein the semiconductor device is configured to be included in a device selected from a group consisting of a communications device, a computer, a set top box, a music player, a video player, an entertainment unit, a navigation device, a personal digital assistant (PDA), and a fixed location data unit.

13. The non-transitory computer-readable medium of claim 9 , wherein the free layer and the capping layer are included in a memory cell of a semiconductor memory array, wherein the semiconductor memory array is configured to be included a packaged semiconductor device, and wherein the packaged semiconductor device is configured to be located on a circuit board according to physical positioning information included in another data file.

14. A method comprising:

receiving a data file including design information corresponding to a semiconductor device; and

fabricating the semiconductor device according to the design information, wherein the semiconductor device comprises:

a barrier layer;

a free layer; and

a capping layer, wherein the free layer is adjacent to the barrier layer and the capping layer, and wherein the capping layer includes a first layer of a substantially non-magnetic material and a second layer of an oxide of the substantially non-magnetic material, and wherein the second layer is positioned further from the free layer than the first layer.

15. The method of claim 14 , wherein the data file has a GDSII format.

16. A method comprising:

receiving a data file including design information including physical positioning information of a packaged semiconductor device on a circuit board; and

manufacturing the circuit board configured to receive the packaged semiconductor device according to the design information, wherein the packaged semiconductor device includes a semiconductor memory array comprising at least one memory cell that comprises:

a barrier layer;

a free layer; and

a capping layer, wherein the free layer is adjacent to the barrier layer and the capping layer, and wherein the capping layer includes a first layer of a substantially non-magnetic material and a second layer of an oxide of the substantially non-magnetic material, and wherein the second layer is positioned further from the free layer than the first layer.

17. The method of claim 16 , wherein the data file has a GERBER format.

18. The method of claim 16 , further comprising integrating the circuit board into a device selected from a group consisting of a set top box, a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, and a computer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2013
From: LEE, KANGHO; ZHU, XIAOCHUN; LI, XIA; KANG, SEUNG H.
To: QUALCOMM INCORPORATED
Reel/Frame 031393/0507 →
Continuity (3)
Division 13349633 · Jan 13, 2012
Division 12396359 · Mar 2, 2009
Related Publication 20140038312A1 · Feb 6, 2014