Laser processing apparatus
A laser processing apparatus includes a beam diameter adjusting unit provided between a laser oscillator and a focusing unit, an imaging unit for detecting the beam diameter of the laser beam directed to a detection path, an optical path length changing unit for moving the imaging unit along the detection path to thereby change an optical path length, and a controller for controlling the imaging unit, the beam diameter adjusting unit, and the optical path length changing unit. The controller operates to move the imaging unit to two positions where different optical path lengths are provided, detect the beam diameters of the laser beam at the two positions, and controls the beam diameter adjusting unit according to the two beam diameters detected above so that the two beam diameters have a predetermined relation.
1. A laser processing apparatus comprising:
a chuck table for holding a workpiece;
laser beam applying means for applying a laser beam to said workpiece held on said chuck table, said laser beam applying means having a laser oscillator for oscillating said laser beam and focusing means for focusing said laser beam oscillated by said laser oscillator;
beam diameter adjusting means provided between said laser oscillator and said focusing means for adjusting the beam diameter of said laser beam oscillated by said laser oscillator;
an optical path changing mirror for changing an optical path of said laser beam passed through said beam diameter adjusting means into an optical path toward said focusing means;
mirror positioning means for selectively positioning said optical path changing mirror at an operative position where said laser beam passed through said beam diameter adjusting means is directed toward said focusing means and at an inoperative position where said laser beam passed through said beam diameter adjusting means is allowed to travel straight toward a detection path;
optical attenuating means provided on said detection path for attenuating said laser beam directed to said detection path, wherein said optical attenuating means only receives said laser beam when said optical path changing mirror is in the inoperative position;
imaging means for detecting the beam diameter of said laser beam attenuated by said optical attenuating means;
optical path length changing means for moving said imaging means along said detection path to thereby change an optical path length; and
control means for controlling said imaging means, said beam diameter adjusting means, and said optical path length changing means;
wherein said control means operates said optical path length changing means to move said imaging means to two positions where different optical path lengths are provided, next operates said imaging means at said two positions to detect the beam diameters of said laser beam at said two positions, and next controls said beam diameter adjusting means according to said two beam diameters detected above so that said two beam diameters have a predetermined relation.
2. The laser processing apparatus according to claim 1 , wherein said predetermined relation of said two beam diameters includes that said two beam diameters are equal to each other.