Fluid control device
A fluid control device includes a vibrating plate including a first main surface and a second main surface, a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate that is provided on the second main surface of the vibrating plate and has a hole provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.
1. A fluid control device comprising:
a vibrating plate including a first main surface and a second main surface;
a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate; and
a plate that faces the second main surface of the vibrating plate and includes a hole; wherein
the plate includes a movable portion arranged to bend and vibrate; and
at least one of either the vibrating plate or the plate includes a projection projecting in a direction between the movable portion and a region of the vibrating plate facing the movable portion.
2. The fluid control device according to claim 1 , further comprising a base plate that is bonded to the plate and includes an opening, wherein
the plate further includes a fixing portion fixed to the base plate; and
the movable portion faces the opening of the base plate.
3. The fluid control device according to claim 1 , wherein the projection is arranged on the second main surface of the vibrating plate and projects to the plate.
4. The fluid control device according to claim 1 , wherein the projection is a circular cylinder.
5. The fluid control device according to claim 1 , wherein the projection includes an end having a thickness that becomes thinner towards a peripheral edge of the projection.
6. The fluid control device according to claim 1 , wherein a region of a whole of the vibrating plate except for the projection is thinner than a thickness of a region of the projection of the vibrating plate.
7. The fluid control device according to claim 2 , wherein an area of a surface of the projection on a side of the opening is larger than an area of an opening surface of the opening.
8. The fluid control device according to claim 1 , further comprising:
a vibrating plate unit including:
the vibrating plate;
a frame plate that surrounds the vibrating plate; and
a link portion that links the vibrating plate and the frame plate and elastically supports the vibrating plate against the frame plate; wherein
the plate is bonded to the frame plate so as to face the second main surface of the vibrating plate.
9. The fluid control device according to claim 8 , wherein the plate is fixed to the frame plate by an adhesive agent containing a plurality of particles, with the plurality of particles interposed between the plate and the frame plate.
10. The fluid control device according to claim 8 , wherein the plate comprises a hole portion formed in a region of the plate facing the link portion.
11. The fluid control device according to claim 1 , wherein the vibrating plate and the driver constitute an actuator and the actuator is disc shaped.