Integrated transformer
A transformer comprising primary and secondary windings is disclosed. Each winding has first and second metal capping layers coupled together electrically in parallel by a metal connector passing through a substrate lying between the first and second metal capping layers.
1. A transformer comprising primary and secondary windings, each winding having first and second metal capping layers coupled together electrically in parallel by a metal connector passing through trenches formed in a substrate lying between the first and second capping layers, wherein the transformer comprises two primary windings that are stacked vertically, wherein the secondary winding surrounds the two primary windings, wherein the two primary windings are formed in first and second dice, wherein the secondary winding is formed in a third silicon die and in a fourth die that are separated by the first and second dice, and wherein the first, second, third and fourth dice are separated by plastic separators.
2. A transformer according to claim 1 , wherein the substrate is a silicon substrate and each of the first and second metal capping layers lies on top and bottom surfaces of the silicon substrate respectively.
3. A transformer according to claim 2 , wherein the substrate is an oxide layer and each of the first and second metal capping layers lies on top and bottom surfaces of the oxide layer respectively.
4. A transformer according to claim 1 , wherein, for each winding, the substrate comprises first and second trenches, and the metal connector comprises first and second parts passing through the first and second trenches respectively, each of the first and second parts coupling the first and second metal capping layers together electrically in parallel.
5. A transformer according to claim 1 , wherein, for each winding, the substrate comprises a first trench, a first part of the metal connector passing through the first trench, the substrate further comprising a common trench through which second parts of the metal connectors for each winding pass electrically isolated from each other, each of the first and second parts coupling the first and second metal capping layers together electrically in parallel.
6. A transformer according to claim 1 , wherein the substrate is a first silicon substrate lying between second and third silicon substrates, each of the first and second metal capping layers for the primary winding lying on top and bottom surfaces of the first silicon substrate respectively and each of the first and second metal capping layers for the secondary winding lying on top and bottom surfaces of the second and third silicon substrates respectively, the metal connector for the primary winding passing through the first silicon substrate and the metal connector for the secondary winding having first and second parts passing in parallel through the first, second and third silicon substrates such that the secondary winding surrounds the primary winding.
7. A transformer according to claim 1 , wherein the substrate is a first oxide layer lying between second and third oxide layers, each of the first and second metal capping layers for the primary winding lying on top and bottom surfaces of the first oxide layer respectively and each of the first and second metal capping layers for the secondary winding lying on top and bottom surface of the second and third oxide layers respectively, the metal connector for the primary winding passing through the first oxide layer and the metal connector for the secondary winding having first and second parts passing in parallel through the first, second and third oxide layers such that the secondary winding surrounds the primary winding.