Semiconductor device manufacturing method, semiconductor device, and wiring board
In a semiconductor device manufacturing method, a semiconductor chip is mounted on a support board so as to expose a side of the semiconductor chip on which a plurality of terminal electrodes are provided. An insulating layer is formed so as to cover the side of the semiconductor chip on which the terminal electrodes are provided. Through electrodes connecting to the terminal electrodes and piercing the insulating layer are formed. Metal wirings connecting to the through electrodes are formed on the insulating layer. External terminal electrodes connecting the metal wiring are formed. Second spacing, spacing between the adjacent external terminal electrodes, is larger than first spacing, spacing between the adjacent terminal electrodes.
1. A semiconductor device manufacturing method comprising:
a semiconductor chip mounting step of mounting a semiconductor chip on a support board so as to expose a side of the semiconductor chip on which a plurality of terminal electrodes are provided;
an insulating layer forming step of forming an insulating layer so as to cover the side of the semiconductor chip on which the terminal electrodes are provided;
a through electrode forming step of forming through electrodes which connect to the terminal electrodes and pierce the insulating layer;
a metal wiring forming step of forming metal wiring connecting to the through electrodes on the insulating layer; and
an external terminal electrode forming step of forming external terminal electrodes for connecting the metal wiring to the outside on the metal wiring,
wherein spacing between the adjacent external terminal electrodes is larger than spacing between the adjacent terminal electrodes, and
wherein said semiconductor chip mounting step comprises:
a metal film forming step of forming a first metal film on the support board and a second metal film on the first metal film;
a fit hole forming step of forming the second metal film with a fit hole to fit the semiconductor chip; and
a fit and adhesion step of fitting the semiconductor chip into the fit hole and adhering the semiconductor chip to the fit hole with an adhesive,
wherein the support board is made of copper, and the first metal film is made of gold, and
wherein a nickel treatment layer is disposed between the support board and the first metal film.
2. The semiconductor device manufacturing method as claimed in claim 1 wherein the fit hole forming step is to deposit a dry film resist on the second metal film, expose and develop the dry film resist to form a resist pattern corresponding to the fit hole, and etch the second metal film formed with the resist pattern.
3. The semiconductor device manufacturing method as claimed in claim 1 wherein the second metal film is copper.