IP Library Granted Patent US 9,052,450
Granted Patent B2
US 9,052,450 · App. 13/083,228 · Granted Jun 9, 2015

Nano-fabricated plasmonic optical transformer

Inventors: Hyuck Choo (Albany, CA); Stefano Cabrini (Albany, CA); P. James Schuck (Berkeley, CA); Xiaogan Liang (Berkeley, CA); Eli Yablonovitch (Oakland, CA)
Assignee: The Regents of the University of California
G02B6/1226Y10T428/24612Y10T29/49826B82Y20/00G11B7/1387G11B7/22
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Quick Facts
Patent No.
US 9,052,450
App. No.
13/083,228
Granted
Jun 9, 2015
Kind
B2
Abstract

The present invention provides a plasmonic optical transformer to produce a highly focuses optical beam spot, where the transformer includes a first metal layer, a dielectric layer formed on the first metal layer, and a second metal layer formed on the dielectric layer, where the first metal layer, the dielectric layer, and the second layer are patterned to a shape including a first section having a first cross section, a second section following the first section having a cross-section tapering from the first section to a smaller cross-section, and a third section following the second section having a cross-section matching the tapered smaller cross-section of the second section.

Claims (47)

1. An optical transformer comprising:

a first metal layer;

a dielectric layer disposed on the first metal layer, the dielectric layer being in a shape comprising:

a first section having a first thickness of about 100 nanometers and a first width,

a second section coupled to the first section having a tapering thickness tapering at a thickness taper angle θ from the first thickness to a smaller thickness of about 15 nanometers to 20 nanometers and having a tapering width from the first width to a smaller width, and

a third section having the smaller thickness and the smaller width coupled to the second section; and

a second metal layer disposed on the dielectric layer.

2. The optical transformer of claim 1 wherein the first metal layer comprises at least one of Au, Ag, Cu, Al, and a high conductivity metal.

3. The optical transformer of claim 1 wherein the first metal layer is approximately 50 nanometers thick.

4. The optical transformer of claim 1 wherein the dielectric layer comprises at least one of a polymer, SiO2, SiO, SiOx, and Si3N4, where x is a non-integer number.

5. The optical transformer of claim 1 wherein the thickness taper angle θ is between about 5 degrees and 90 degrees.

6. The optical transformer of claim 1 wherein a thickness of the dielectric layer in the second section varies from the first thickness to the smaller thickness.

7. The optical transformer of claim 1 wherein the first width is about 100 nanometers, wherein the smaller width is about 15 nanometers to 20 nanometers, and wherein a width of the second section varies from the first width to the smaller width.

8. The optical transformer of claim 1 wherein the thickness tapering angle θ varies over a range from 0 degrees to a specified value.

9. A method of making an optical transformer comprising:

providing a first metal layer;

forming a dielectric layer on the first metal layer, the dielectric layer being in a shape comprising:

a first section having a first thickness of about 100 nanometers and a first width,

a second section coupled to the first section having a tapering thickness tapering at a thickness taper angle θ from the first thickness to a smaller thickness of about 15 nanometers to 20 nanometers and having a tapering width from the first width to a smaller width, and

a third section having the smaller thickness and the smaller width coupled to the second section; and

forming a second metal layer on the dielectric layer.

10. The method of claim 9 wherein the first metal layer comprises at least one of Au, Ag, Cu, Al, and a high conductivity metal.

11. The method of claim 9 wherein the first metal layer is approximately 50 nanometers thick.

12. The method of claim 9 wherein the dielectric layer comprises at least one of a polymer, SiO2, SiO, SiOx, and Si3N4, where x is a non-integer.

13. The method of claim 9 wherein forming the dielectric layer includes forming the tapering thickness in the dielectric layer in the second section by a selective electron-beam induced deposition process.

14. The method of claim 9 wherein the thickness taper angle θ is between about 5 degrees and 90 degrees.

15. The method of claim 9 wherein forming the dielectric layer includes forming the dielectric layer such that a thickness of the dielectric layer in the second section varies from the first thickness to the smaller thickness.

16. The method of claim 9 wherein the first width is about 100 nanometers, wherein the smaller width is about 15 nanometers to 20 nanometers, and wherein a width of the second section varies from the first width to the smaller width.

17. The method of claim 9 further comprising:

patterning the widths of the optical transformer by focused ion beam milling.

18. The method of claim 9 wherein the thickness tapering angle θ is variable over a range from 0 degrees to a specified value.

19. The optical transformer of claim 1 wherein the optical transformer is associated with an optical read/write device configured to write and/or read data from an optical storage medium.

20. The optical transformer of claim 1 wherein the optical transformer is configured to read and write data to and/or from an optical storage medium by coupling a light signal to the optical storage medium.

21. The optical transformer of claim 1 wherein the optical transformer is associated with a device configured to perform optical spectroscopy.

22. The optical transformer of claim 1 wherein the second metal layer comprises at least one of Au, Ag, Cu, Al, and a high conductivity metal.

23. The optical transformer of claim 1 wherein the second metal layer is approximately 50 nanometers thick.

24. The method of claim 9 wherein the second metal layer comprises at least one of Au, Ag, Cu, Al, and a high conductivity metal.

25. The method of claim 9 wherein the second metal layer is approximately 50 nanometers thick.

26. The optical transformer of claim 1 wherein a thickness of the first metal layer is substantially uniform, and wherein a thickness of the second metal layer is substantially uniform.

27. The method of claim 9 wherein a thickness of the first metal layer is substantially uniform, and wherein a thickness of the second metal layer is substantially uniform.

28. An optical transformer comprising:

a first metal layer;

a dielectric layer disposed on the first metal layer, the dielectric layer being in a shape comprising:

a first section having a first thickness and a first width of about 100 nanometers,

a second section coupled to the first section having a tapering thickness tapering at a thickness taper angle θ from the first thickness to a smaller thickness and having a tapering width from the first width to a smaller width of about 15 nanometers to 20 nanometers, a width of the second section varying from the first width to the smaller width, and

a third section having the smaller thickness and the smaller width coupled to the second section; and

a second metal layer disposed on the dielectric layer.

Assignments (4)
CONFIRMATORY LICENSE Recorded Oct 22, 2020
From: UNIVERSITY OF CALIF-LAWRENC BERKELEY LAB
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 054135/0103 →
CONFIRMATORY LICENSE Recorded Aug 30, 2011
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 026833/0009 →
CONFIRMATORY LICENSE Recorded Jun 16, 2011
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 026451/0344 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2011
From: CHOO, HYUCK; CABRINI, STEFANO; SCHUCK, P. JAMES; LIANG, XIAOGAN; YABLONOVITCH, ELI
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 026389/0535 →
Continuity (2)
Provisional Application 61322121 · Apr 8, 2010
Related Publication 20110249546A1 · Oct 13, 2011