Canister
A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.
1. A canister comprising:
a container configured to contain a liquid material;
an outlet conduit connected to an outlet of the container and configured to discharge a gaseous material vaporized from the liquid material;
a first blocking structure provided in the container and comprising a cover covering the outlet to inhibit the liquid material from reaching the outlet conduit;
a plurality of baffle plates disposed within the container, the plurality of baffle plates being spaced apart from each other; and
a second blocking structure located below the first blocking structure, the second blocking structure comprising a main body extending inwardly from a side wall of the container, the second blocking structure further comprising a flange generally extending downward from the main body to inhibit a portion of the liquid material moving upwardly from reaching a through hole defined by the second blocking structure.
2. The canister of claim 1 , wherein the container is divided into an upper space and a lower space by the second blocking structure, and
wherein the upper space and the lower space are connected to and in fluid communication with each other through the through hole.
3. The canister of claim 1 , wherein the main body is tightly attached to the side wall of the container.
4. The canister of claim 1 , wherein the flange extends generally downward from an innermost end of the main body member.
5. The canister of claim 1 , wherein the cover is spaced apart from the outlet.
6. The canister of claim 1 , wherein the cover extends over the outlet.
7. The canister of claim 1 , wherein the cover is spaced apart from the side wall of the container.
8. The canister of claim 1 , wherein the cover has a plate shape.
9. The canister of claim 1 , further comprising an inlet conduit connected to the container in order to introduce carrier gas into the container,
wherein the cover is spaced apart from an inlet of the container, which is connected to the inlet conduit.
10. The canister of claim 1 , further comprising an inlet conduit connected to the container so as to introduce carrier gas into the container,
wherein the cover extends over an inlet of the container, which is connected to the inlet conduit.
11. The canister of claim 1 , further comprising a supporter supporting the plurality of baffle plates,
wherein the supporter extends through the plurality of baffle plates.
12. The canister of claim 1 , further comprising a supporter formed to contact a bottom wall of the container.
13. The canister of claim 1 , further comprising a supporter connected to the cover.
14. The canister of claim 1 , further comprising an inlet conduit connected to the container in order to introduce carrier gas into container,
wherein the inlet conduit is spaced apart from the liquid material stored in the container.
15. The canister of claim 1 , further comprising an inlet conduit connected to the container in order to introduce carrier gas into container,
wherein an end of the inlet conduit is configured to be immersed in the liquid material stored in the container.
16. The canister of claim 15 , wherein the inlet conduit extends through the first blocking structure, the second blocking structure, and at least part of the plurality of baffle plates.
17. The canister of claim 1 , further comprising one or more level sensors configured to detect an amount of the liquid material contained in the container.
18. The canister of claim 17 , wherein each of the one or more level sensors is disposed on one surface of one of the plurality of baffle plates.
19. The canister of claim 17 , further comprising a supporter extending through the plurality of baffle plates so as to support the plurality of baffle plates,
wherein the supporter extends through the one or more level sensors.
20. The canister of claim 17 , further comprising an inlet conduit connected to the container and extends in the container in order to introduce carrier gas into the container,
wherein the inlet conduit extends through the one or more level sensors.