IP Library Granted Patent US 9,058,993
Granted Patent B2
US 9,058,993 · App. 13/892,446 · Granted Jun 16, 2015

Methods for making large-area, free-standing metal oxide films

Inventors: Xudong Wang (Madison, WI); Zhenqiang Ma (Middleton, WI); Fei Wang (Madison, WI); Jung-Hun Seo (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
H01L21/02628C30B7/14C30B29/16H01L21/02554H01L29/7869H01L33/28H01L21/0259
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Quick Facts
Patent No.
US 9,058,993
App. No.
13/892,446
Granted
Jun 16, 2015
Kind
B2
Abstract

The present invention provides continuous, free-standing metal oxide films and methods for making said films. The methods are able to produce large-area, flexible, thin films having one or more continuous, single-crystalline metal oxide domains. The methods include the steps of forming a surfactant monolayer at the surface of an aqueous solution, wherein the headgroups of the surfactant molecules provide a metal oxide film growth template. When metal ions in the aqueous solution are exposed to the metal oxide film growth template in the presence of hydroxide ions under suitable conditions, a continuous, free-standing metal oxide film can be grown from the film growth template downward into the aqueous solution.

Claims (17)

1. A method of making a metal oxide film, the method comprising:

(a) forming a surfactant monolayer at an air-aqueous solution interface at the surface of an aqueous solution, wherein the headgroups of the surfactant molecules provide a metal oxide film growth template; and

(b) exposing metal ions to the metal oxide film growth template in the presence of hydroxide ions under conditions that promote the growth of a metal oxide film from the metal oxide film growth template downward into the aqueous solution.

2. The method of claim 1 , wherein the metal ions are zinc ions.

3. The method of claim 2 , wherein the surfactant molecules are dodecyl sulfate molecules.

4. The method of claim 2 , wherein the metal oxide film comprises zinc oxide having a wurtzite structure.

5. The method of claim 4 , wherein the metal oxide film is a continuous, free-standing metal oxide film and comprises at least one continuous, single-crystalline zinc oxide domain that is characterized by a hexagonal lattice parameter.

6. The method of claim 2 , wherein the metal oxide film comprises zinc oxide having a Zn 0.75 O x structure.

7. The method of claim 6 , wherein the metal oxide film is a continuous, free-standing metal oxide film and comprises at least one continuous, single-crystalline zinc oxide domain that is characterized by a rectangular lattice parameter.

8. The method of claim 1 , wherein the metal oxide film is a continuous, free-standing metal oxide film and comprises at least one continuous, single-crystalline metal oxide domain having an area of at least 0.1 μm 2 .

9. The method of claim 1 , wherein the metal oxide film has a surface area of at least 1 cm 2 .

10. The method of claim 1 , wherein the metal ions comprise at least one of magnesium ions, copper ions, titanium ions, tin ions or barium ions.

11. The method of claim 1 , wherein the metal oxide film has a thickness of no greater than about 1000 nm.

12. The method of claim 1 , further comprising transferring the metal oxide film from the aqueous solution to a substrate.

13. The method of claim 12 , wherein the substrate is a flexible plastic substrate.

14. The method of claim 12 , further comprising lithographically patterning the metal oxide film.

15. The method of claim 12 , further comprising incorporating the metal oxide film into a thin film transistor, a solar cell, a light-emitting diode for the ultraviolet or a laser diode.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2013
From: WANG, XUDONG; MA, ZHENQIANG; WANG, FEI; SEO, JUNG-HUN
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 031115/0978 →
CONFIRMATORY LICENSE Recorded Jul 31, 2013
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 030936/0287 →
Continuity (2)
Division 12723190 · Mar 12, 2010
Related Publication 20140134793A1 · May 15, 2014