Methods of forming integrated circuit capacitors having composite dielectric layers therein containing crystallization inhibiting regions
Integrated circuit capacitors have composite dielectric layers therein. These composite dielectric layers include crystallization inhibiting regions that operate to increase the overall crystallization temperature of the composite dielectric layer. An integrated circuit capacitor includes first and second capacitor electrodes and a capacitor dielectric layer extending between the first and second capacitor electrodes. The capacitor dielectric layer includes a composite of a first dielectric layer extending adjacent the first capacitor electrode, a second dielectric layer extending adjacent the second capacitor electrode and an electrically insulating crystallization inhibiting layer extending between the first and second dielectric layers. The electrically insulating crystallization inhibiting layer is formed of a material having a higher crystallization temperature characteristic relative to the first and second dielectric layers.
1. A method of forming a capacitor of an integrated circuit device, the method comprising:
forming a lower electrode on a substrate, wherein the lower electrode is a metal nitride layer;
forming a first hafnium oxide layer directly contacting an upper surface of the metal nitride layer;
forming an aluminum oxide layer on the first hafnium oxide layer;
forming a second hafnium oxide layer on the aluminum oxide layer, wherein the aluminum oxide layer is disposed between the first and second hafnium oxide layers; and
forming an upper electrode directly contacting an upper surface of the second hafnium oxide layer, wherein the aluminum oxide layer has a thickness smaller than at least one of thicknesses of the first and second hafnium oxide layers.
2. The method of claim 1 , wherein the metal nitride layer is a titanium nitride layer.
3. The method of claim 1 , wherein the second hafnium oxide layer has a thickness smaller than a thickness of the first hafnium oxide layer.
4. The method of claim 1 , wherein the first and second hafnium oxide layers have an equivalent thickness.
5. The method of claim 1 , wherein the metal nitride layer is a first metal nitride layer, and the upper electrode is a second metal nitride layer.
6. The method of claim 5 , wherein the second metal nitride layer directly contacts the upper surface of the second hafnium oxide layer.
7. The method of claim 6 , wherein the second metal nitride layer is a titanium nitride layer.
8. The method of claim 1 , wherein the aluminum oxide layer directly contacts an upper surface of the first hafnium oxide layer.
9. The method of claim 8 , wherein the second hafnium oxide layer directly contacts an upper surface of the aluminum oxide layer.
10. The method of claim 9 , wherein the metal nitride layer is a first metal nitride layer, and the upper electrode is a second metal nitride layer directly contacting the upper surface of the second hafnium oxide layer.
11. The method of claim 10 , wherein the second metal nitride layer is a titanium nitride layer.
12. The method of claim 1 , wherein the thickness of the aluminum oxide layer is in a range of 0.1 nm to 2 nm.
13. A method of forming an integrated circuit device, the method comprising:
forming a capacitor on a substrate comprising a lower electrode, an upper electrode, and a dielectric layer between the lower and upper electrodes,
wherein the lower electrode is a metal nitride layer, the dielectric layer comprises a first hafnium oxide layer directly contacting an upper surface of the metal nitride layer and an aluminum oxide layer extending between the first hafnium oxide layer and the upper electrode, and
the aluminum oxide layer has a thickness smaller than a thickness of the first hafnium oxide layer.
14. The method of claim 13 , wherein:
the first hafnium oxide layer comprises a plurality of first hafnium oxide layers and the aluminum oxide layer comprises a plurality of aluminum oxide layers;
the plurality of first hafnium oxide layers and the plurality of aluminum oxide layers are stacked in an alternating sequence; and
a lowermost one of the plurality of first hafnium oxide layers directly contacts the upper surface of the metal nitride layer.
15. The method of claim 13 , further comprising forming a second hafnium oxide layer between the aluminum oxide layer and the upper electrode.
16. The method of claim 15 , wherein the metal nitride layer is a first metal nitride layer, and the upper electrode is a second metal nitride directly contacting an upper surface of the second hafnium oxide layer.
17. The method of claim 16 , wherein the second metal nitride layer is a titanium nitride layer.
18. The method of claim 13 , wherein the metal nitride layer is a titanium nitride layer.
19. A method of forming a capacitor, the method comprising:
forming a lower electrode and an upper electrode; and
forming first and second dielectric layers between the lower and upper electrodes,
wherein the first dielectric layer comprises a material different from the second dielectric layer, the first dielectric layer is a hafnium oxide layer having a thickness larger than a thickness of the second dielectric layer, and
the lower electrode is a metal nitride layer directly contacting the hafnium oxide layer.
20. The method of claim 19 , wherein the metal nitride layer is a titanium nitride layer.
21. The method of claim 19 , wherein the second dielectric layer is an aluminum oxide layer, an aluminum nitride layer or a silicon nitride layer.