IP Library › Granted Patent US 9,059,560
Granted Patent B2
US 9,059,560 · App. 14/213,835 · Granted Jun 16, 2015

Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population

Inventors: Vladimir Dribinski (Livermore, CA); Yung-Ho Chuang (Cupertino, CA)
Assignee: KLA-Tencor Corporation
H01S3/091G02F1/3525H01S3/005
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Quick Facts
Patent No.
US 9,059,560
App. No.
14/213,835
Granted
Jun 16, 2015
Kind
B2
Abstract

Laser-induced damage in an optical material can be mitigated by creating conditions at which light absorption is minimized. Specifically, electrons populating defect energy levels of a band gap in an optical material can be promoted to the conduction band—a process commonly referred to as bleaching. Such bleaching can be accomplished using a predetermined wavelength that ensures minimum energy deposition into the material, ideally promoting electron to just inside the conduction band. In some cases phonon (i.e. thermal) excitation can also be used to achieve higher depopulation rates. In one embodiment, a bleaching light beam having a wavelength longer than that of the laser beam can be combined with the laser beam to depopulate the defect energy levels in the band gap. The bleaching light beam can be propagated in the same direction or intersect the laser beam.

Claims (18)

1. A method for increasing a lifetime of an optical material exposed to a laser light source, the laser light source generating multiple laser beams having at least one wavelength, the method comprising:

providing an optical delay element for delaying at least one wavelength of the multiple laser beams, wherein the delaying minimizes cross-absorption and maximizes transient color center bleaching;

combining a delayed wavelength with any remaining un-delayed wavelengths to generate a combined beam;

using the combined beam for operation of a laser system including the optical material, and

adjusting a temperature of the optical material to provide annealing,

wherein the laser light source is pulsed, and wherein the temperature is kept low while laser pulses are present in the optical material, and the temperature is kept high when no laser pulses are present in the optical material.

2. The method of claim 1 , wherein the laser pulses are between 193 nm and 532 nm.

3. The method of claim 1 , wherein the at least one wavelength is a fundamental wavelength.

4. The method of claim 1 , wherein the at least one wavelength is a low harmonic wavelength.

5. The method of claim 1 , wherein the optical material includes Cesium Lithium Borate (CLBO), BBO (beta-barium borate), CBO (cesium triborate), LBO (lithium triborate), KDP (potassium dihydrogen phosphate), KD*P, ADP (ammonium dihydrogen phosphate), KTP (potassium titanyl phosphate), or periodically polled material.

6. A laser system comprising:

a laser light source for generating multiple laser beams;

an optical delay element for delaying at least one wavelength of the multiple laser beams, wherein the delaying minimizes cross-absorption and maximizes transient color center bleaching;

a beam combiner for combining the delayed wavelength with any remaining un-delayed wavelengths to generate a combined beam; and

a temperature-controlled environment for optical material of the laser system including a temperature adjustment component configured to provide localized annealing by keeping a temperature of the optical material low while laser pulses are present in the optical material, and keeping the temperature of the optical material high when no laser pulses are present in the optical material.

7. The laser system of claim 6 , wherein the at least one wavelength is a fundamental wavelength.

8. The laser system of claim 6 , wherein the at least one wavelength is a low harmonic wavelength.

9. The laser system of claim 6 , wherein the optical material includes Cesium Lithium Borate (CLBO), BBO (beta-barium borate), CBO (cesium triborate), LBO (lithium triborate), KDP (potassium dihydrogen phosphate), KD*P, ADP (ammonium dihydrogen phosphate), KTP (potassium titanyl phosphate), or periodically polled material.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 14, 2014
From: DRIBINSKI, VLADIMIR; CHUANG, YUNG-HO
To: KLA-TENCOR CORPORATION
Reel/Frame 032453/0870 →
Continuity (3)
Division 12772953 · May 3, 2010
Provisional Application 61292375 · Jan 5, 2010
Related Publication 20140198818A1 · Jul 17, 2014