Method for manufacturing a hybrid integrated component
A manufacturing method for hybrid integrated components having a very high degree of miniaturization is provided, which hybrid integrated components each have at least two MEMS elements each having at least one assigned ASIC element. Two MEMS/ASIC wafer stacks are initially created independently of one another in that two ASIC substrates are processed independently of one another; a semiconductor substrate is mounted on the processed surface of each of the two ASIC substrates, and a micromechanical structure is subsequently created in each of the two semiconductor substrates. The two MEMS/ASIC wafer stacks are mounted on top of each other, MEMS on MEMS. Only subsequently are the components separated.
1. A method for manufacturing hybrid integrated components each having at least two MEMS elements, at least one ASIC element being assigned to each MEMS element, the method comprising:
initially creating two MEMS/ASIC wafer stacks independently of one another, by performing the following:
processing two ASIC substrates independently of one another;
mounting a semiconductor substrate on the processed surface of each of the two ASIC substrates; and
subsequently creating a micromechanical structure in each of the two semiconductor substrates;
mounting the two MEMS/ASIC wafer stacks on top of each other, MEMS on MEMS; and
subsequently separating the components.
2. The method as recited in claim 1 , wherein the processed surface of at least one of the two ASIC substrates is structured by at least one of (i) creating at least one recess in an area beneath the micromechanical structure of the MEMS element to be created, and (ii) creating a pedestal structure for mounting an assigned MEMS substrate.
3. The method as recited in claim 2 , wherein at least one of the two MEMS substrates is bonded to the assigned ASIC substrate.
4. The method as recited in claim 2 , wherein at least one of the two MEMS substrates is thinned down to a predefined structural height of the micromechanical structure to be created, so that subsequently a micromechanical structure extending over the entire thickness of the MEMS substrate is created.
5. The method as recited in claim 2 , wherein the micromechanical structure is created in at least one of the two MEMS substrates in a trench process.
6. The method as recited in claim 2 , wherein at least one through-contact which establishes an electrical connection between a selected ASIC substrate and a surface of an MEMS substrate facing away from the selected ASIC substrate is created in at least one of the two MEMS substrates.
7. The method as recited in claim 6 , wherein mechanical and electrical connections between the two MEMS/ASIC wafer stacks are established in a bond process.