Semiconductor device and manufacturing method of the same
A semiconductor device includes a semiconductor substrate, a metal gate structure, at least an epitaxial layer, an interlayer dielectric, at least a contact hole, at least a metal silicide layer and a fluorine-containing layer. The semiconductor substrate has at least a gate region and at least a source/drain region adjoining the gate region. The gate structure is disposed on the semiconductor substrate within the gate region. The epitaxial layer is disposed on the semiconductor substrate within the source/drain region. The interlayer dielectric covers the semiconductor substrate, the gate structure and the epitaxial layer. The contact hole penetrates the interlayer dielectric to reach the epitaxial layer. The metal silicide layer is formed in the epitaxial layer and is located on the bottom of the contact hole. The fluorine-containing layer is disposed on or in the epitaxial layer and is around sides of the metal silicide layer.
1. A semiconductor device, comprising:
a semiconductor substrate having at least a gate region and at least a source/drain region adjoining the gate region;
a gate structure disposed on the semiconductor substrate within the gate region;
at least an epitaxial layer disposed on the semiconductor substrate within the source/drain region;
an interlayer dielectric covering the semiconductor substrate, the gate structure and the epitaxial layer;
at least a contact hole penetrating the interlayer dielectric to reach the epitaxial layer;
at least a metal silicide layer formed in the epitaxial layer on a bottom of the contact hole;
a fluorine-containing layer disposed on or in the epitaxial layer and disposed on a periphery of the metal silicide layer, wherein a top surface of the gate structure is not covered by the fluorine-containing layer; and
an etch stop film disposed on the fluorine-containing layer.
2. The semiconductor device according to claim 1 , wherein the gate structure is a metal gate structure.
3. The semiconductor device according to claim 2 , wherein the metal gate structure further comprises a metal gate and at least a spacer disposed on a sidewall of the metal gate.
4. The semiconductor device according to claim 3 , wherein the spacer has a single-layered structure or a multi-layered structure.
5. The semiconductor device according to claim 1 , wherein the fluorine-containing layer is further located under a bottom of the metal silicide layer.
6. The semiconductor device according to claim 1 , wherein a position of the fluorine-containing layer disposed on the periphery of the metal silicide layer is higher than a position of the fluorine-containing layer located under a bottom of the metal silicide layer.
7. The semiconductor device according to claim 1 , wherein the epitaxial layer comprises silicon germanium, silicon phosphorous, silicon carbon or phosphorus-doped silicon carbon.
8. The semiconductor device according to claim 1 , wherein the metal silicide layer comprises nickel silicide, nickel platinum silicide, platinum silicide, cobalt silicide or tungsten silicide.
9. The semiconductor device according to claim 1 , wherein the contact hole has an elliptical shape, a bar shape or a circular shape.
10. The semiconductor device according to claim 1 , wherein the semiconductor device is a fin field effect transistor (Fin-FET).
11. The semiconductor device according to claim 1 , wherein the fluorine-containing layer is around sides of the metal silicide layer.