IP Library Granted Patent US 9,087,835
Granted Patent B2
US 9,087,835 · App. 14/140,149 · Granted Jul 21, 2015

Structures embedded within core material and methods of manufacturing thereof

Inventors: Sehat Sutardja (Los Altos Hills, CA); Albert Wu (Palo Alto, CA); Scott Wu (San Jose, CA)
Assignee: Marvell World Trade Ltd.
H01L25/50H01L23/12H01L23/3114H01L23/481H01L23/49822H01L23/5389H01L24/24H01L24/25H01L24/73H01L25/0652H01L25/0657H01L25/18H01L23/49827H01L24/48H01L2224/16225H01L2224/24051H01L2224/24226H01L2224/32225H01L2224/48091H01L2224/73204H01L2224/73253H01L2224/73267H01L2225/06524H01L2225/06541H01L2225/06582H01L2225/06589H01L2924/014H01L2924/01005H01L2924/01006H01L2924/01013H01L2924/01019H01L2924/01029H01L2924/01033H01L2924/01079H01L2924/15311H01L2924/16152
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,087,835
App. No.
14/140,149
Filed
Dec 24, 2013
Granted
Jul 21, 2015
Kind
B2
Examiner
NGO, NGAN V
Art Unit
2893
USPC
257/738
Abstract

Embodiments of the present disclosure provide a method that comprises providing a first die having a surface comprising a bond pad to route electrical signals of the first die and attaching the first die to a layer of a substrate. The method further comprises forming one or more additional layers of the substrate to embed the first die in the substrate and coupling a second die to the one or more additional layers, the second die having a surface comprising a bond pad to route electrical signals of the second die. The second die is coupled to the one or more additional layers such that electrical signals are routed between the first die and the second die.

Claims (81)

1. A method comprising:

providing a first die having (i) a first surface, (ii) a second surface that is opposite to the first surface, (iii) a third surface that is perpendicular to the first surface, and (iii) a fourth surface that is perpendicular to the first surface, wherein the second surface of the first die comprises a first bond pad, wherein the first bond pad of the first die is configured to route electrical signals of the first die;

attaching the first surface of the first die to a layer of a substrate;

attaching the second surface of the first die to a first surface of an interposer, wherein the interposer comprises a first via, and wherein the interposer has (i) the first surface, and (ii) a second surface that is opposite to the first surface, (iii) a third surface that is perpendicular to the first surface, and (iii) a fourth surface that is perpendicular to the first surface;

forming one or more additional layers of the substrate to embed the first die and the interposer in the substrate such that the one or more additional layers of the substrate is attached to (i) the third surface and the fourth surface of the first die and (ii) the third surface and the fourth surface of the interposer; and

coupling a second die to the one or more additional layers of the substrate, wherein the second die has a surface comprising a second bond pad, and wherein the second bond pad of the second die is configured to route electrical signals of the second die,

wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between the first die and the second die via (i) the first bond pad of the first die, (ii) the first via of the interposer, (iii) a routing structure that is in part disposed within the one or more additional layers of the substrate, and (iv) the second bond pad of the second die.

2. The method of claim 1 , wherein coupling the second die to the one or more additional layers of the substrate comprises:

coupling the second die to the one or more additional layers of the substrate using solder balls.

3. The method of claim 2 , further comprising:

providing underfill material between (i) the second die and (ii) the one or more additional layers of the substrate.

4. The method of claim 1 , further comprising:

coupling a heat sink to the second die,

wherein the second die is coupled to the one or more additional layers of the substrate at a first surface of the second die, and

wherein the heat sink is coupled to the second die at a second surface of the second die that is opposite to the first surface of the second die.

5. The method of claim 1 , further comprising:

providing a third die, wherein the third die has a surface comprising a third bond pad, and wherein the third bond pad is configured to route electrical signals of the third die; and

attaching the third die to a layer of the substrate,

wherein forming the one or more additional layers of the substrate to embed the first die and the interposer in the substrate includes forming the one or more additional layers of the substrate to embed the third die in the substrate, and

wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between (i) the third die and (ii) the second die.

6. The method of claim 5 , wherein providing the third die comprises

providing the third die beside the first die in a substantially side-by-side arrangement.

7. The method of claim 5 , wherein providing the third die comprises

providing the third die over the first die such that the third die and the first die are in a substantially stacked arrangement.

8. The method of claim 7 , further comprising:

providing a fourth die, wherein the fourth die has a surface comprising a fourth bond pad, and wherein the fourth bond pad is configured to route electrical signals of the fourth die; and

providing a fifth die, wherein the fifth die has a surface comprising a fifth bond pad, and wherein the fifth bond pad is configured to route electrical signals of the fifth die,

wherein the third die is provided over the first die such that the third die and the first die are in a substantially stacked arrangement,

wherein the fifth die is provided over the fourth die such that the fifth die and the fourth die are in a substantially stacked arrangement,

wherein (i) the first die and the third die are arranged in a substantially side-by-side arrangement, and (ii) the fourth die and the fifth die are arranged in a substantially side-by-side arrangement,

wherein forming the one or more additional layers of the substrate to embed the first die in the substrate includes forming the one or more additional layers of the substrate to embed (i) the fourth die and (ii) the fifth die in the substrate,

wherein the second die is coupled to the one or more additional layers such that electrical signals are routed between (i) the fourth die and (ii) the second die, and

wherein the second die is coupled to the one or more additional layers such that electrical signals are routed between (i) the fifth die and (ii) the second die.

9. The method of claim 1 , further comprising:

forming one or more routing structures such that the one or more routing structures electrically couple (i) the first bond pad of the first die with (ii) the second bond pad of the second die.

10. The method of claim 9 , wherein the one or more routing structures are embedded within the one or more additional layers of the substrate.

11. The method of claim 1 , wherein at least a part of the one or more additional layers of the substrate separates the first die and the interposer from the second die.

12. The method of claim 1 , wherein a die package comprises the first die, the second die, and the substrate, and wherein the method further comprises:

forming a first one or more routing structures that connects the second die to a first device that is external to the die package.

13. The method of claim 1 , wherein the first die is a memory die.

14. The method of claim 1 , wherein:

the layer of the substrate is a first layer of the substrate;

the one or more additional layers of the substrate comprises (i) a core material layer and (ii) a second layer; and

the second surface of the interposer, which is opposite the first surface of the interposer, faces the second layer of the substrate.

15. The method of claim 14 , wherein:

at least a part of the core material layer separates at least a section of the second surface of the interposer from the second layer.

16. A method comprising:

providing a first die having (i) a first surface and (ii) a second surface that is opposite to the first surface, wherein the second surface of the first die comprises a first bond pad, wherein the first bond pad of the first die is configured to route electrical signals of the first die;

attaching the first surface of the first die to a layer of a substrate;

attaching the second surface of the first die to an interposer, wherein the interposer comprises a first via;

forming one or more additional layers of the substrate to embed the first die and the interposer in the substrate; and

coupling a second die to the one or more additional layers of the substrate, wherein the second die has a surface comprising a second bond pad, and wherein the second bond pad of the second die is configured to route electrical signals of the second die,

wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between the first die and the second die via (i) the first bond pad of the first die, (ii) the first via of the interposer, (iii) a routing structure that is in part disposed within the one or more additional layers of the substrate, and (iv) the second bond pad of the second die,

wherein the layer of the substrate is a first laminate layer, and

wherein the one or more additional layers of the substrate comprises (i) a second laminate layer and (ii) a core material layer that is disposed between the first laminate layer and the second laminate layer.

17. The method of claim 16 , wherein:

the first surface of the first die is coupled to the first laminate layer;

the second surface of the first die is attached to a first surface of the interposer;

a second surface of the interposer is opposite the first surface of the interposer;

the second surface of the interposer faces the second laminate layer;

the first die and the interposer are embedded in the core material of the substrate such that the core material separates at least a section of the second surface of the interposer from the second laminate layer; and

the second die is coupled to the second laminate layer.

18. The method of claim 1 , wherein:

the layer of the substrate is a first laminate layer; and

the one or more additional layers of the substrate comprises (i) a second laminate layer and (ii) a core material layer that is disposed between the first laminate layer and the second laminate layer.

19. The method of claim 18 , wherein:

the first surface of the first die is coupled to the first laminate layer;

the second surface of the first die is attached to a first surface of the interposer;

a second surface of the interposer is opposite the first surface of the interposer;

the second surface of the interposer faces the second laminate layer;

the first die and the interposer are embedded in the core material of the substrate such that the core material separates at least a section of the second surface of the interposer from the second laminate layer; and

the second die is coupled to the second laminate layer.

20. The method of claim 1 , wherein forming the one or more additional layers of the substrate further comprises:

forming the one or more additional layers of the substrate such that the one or more additional layers of the substrate is not formed between the second surface of the first die and the first surface of the interposer.

21. The method of claim 1 , wherein attaching the second surface of the first die to the first surface of the interposer further comprises:

attaching the second surface of the first die to the first surface of the interposer such that no underfill material is disposed in between the second surface of the first die and the first surface of the interposer.

22. The method of claim 1 , wherein:

the layer of the substrate is a first layer of the substrate; and

the one or more additional layers of the substrate comprises (i) a core material layer and (ii) a second layer,

wherein forming the one or more additional layers of the substrate comprises

forming the core material layer such that the core material layer is attached to (i) the third surface and the fourth surface of the first die and (ii) the third surface and the fourth surface of the interposer.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2020
From: CAVIUM INTERNATIONAL
To: MARVELL ASIA PTE, LTD.
Reel/Frame 053475/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2020
From: MARVELL INTERNATIONAL LTD.
To: CAVIUM INTERNATIONAL
Reel/Frame 052918/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 29, 2020
From: MARVELL WORLD TRADE LTD.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 051778/0537 →
Continuity (6)
Division 13184304 · Jul 15, 2011
Continuation In Part 13049550 · Mar 16, 2011
Provisional Application 61368555 · Jul 28, 2010
Provisional Application 61366136 · Jul 20, 2010
Provisional Application 61315319 · Mar 18, 2010
Related Publication 20140106508A1 · Apr 17, 2014