III-V multi-channel FinFETs
A device includes insulation regions over portions of a semiconductor substrate, and a III-V compound semiconductor region over top surfaces of the insulation regions, wherein the III-V compound semiconductor region overlaps a region between opposite sidewalls of the insulation regions. The III-V compound semiconductor region includes a first and a second III-V compound semiconductor layer formed of a first III-V compound semiconductor material having a first band gap, and a third III-V compound semiconductor layer formed of a second III-V compound semiconductor material between the first and the second III-V compound semiconductor layers. The second III-V compound semiconductor material has a second band gap lower than the first band gap. A gate dielectric is formed on a sidewall and a top surface of the III-V compound semiconductor region. A gate electrode is formed over the gate dielectric.
1. A device comprising:
a semiconductor substrate;
a fin field-effect transistor (FinFET) comprising:
a III-V compound semiconductor region over a portion of the semiconductor substrate and forming a fin of the FinFET, wherein the III-V compound semiconductor region comprises:
a first plurality of III-V compound semiconductor layers formed of a first III-V compound semiconductor material having a first band gap;
a second plurality of III-V compound semiconductor layers formed of a second III-V compound semiconductor material having a second band gap different from the first band gap; and
a third plurality of III-V compound semiconductor layers formed of a third III-V compound semiconductor material having a third band gap different from the first band gap and the second band gap, wherein the first, the second, and the third plurality of III-V compound semiconductor layers are stacked with an alternating pattern;
a gate dielectric on sidewalls and a top surface of the III-V compound semiconductor region; and
a gate electrode over the gate dielectric.
2. The device of claim 1 further comprising shallow trench isolation (STI) regions in the semiconductor substrate and comprising sidewalls facing each other, wherein the III-V compound semiconductor region is disposed over a region that is between the sidewalls of the STI regions.
3. The device of claim 2 further comprising a buffer layer under the III-V compound semiconductor region, wherein the buffer layer comprises sidewalls contacting the sidewalls of the STI regions, and wherein the buffer layer has a lattice constant between a lattice constant of the semiconductor substrate and lattice constants of the first and the second III-V compound semiconductor materials.
4. The device of claim 3 , wherein the buffer layer comprises InGaAs.
5. The device of claim 1 , wherein the first III-V compound semiconductor material comprises AlAs, and wherein the second III-V compound semiconductor material comprises InAs.
6. The device of claim 1 , wherein source and drain regions of the FinFET comprise same III-V compound semiconductor materials as one of the first and the second plurality of III-V compound semiconductor layers.
7. The device of claim 1 , wherein source and drain regions of the FinFET comprise a semiconductor material different from materials of the first and the second plurality of III-V compound semiconductor layers.
8. The device of claim 1 , wherein the first band gap and the second band gap have a difference greater than about 0.2 eV.
9. A device comprising:
a semiconductor substrate;
a fin field-effect transistor (FinFET) comprising:
a III-V compound semiconductor fin over a portion of the semiconductor substrate and forming a fin of the FinFET, wherein the III-V compound semiconductor fin comprises:
a first plurality of III-V compound semiconductor layers formed of a first III-V compound semiconductor material having a first band gap;
a second plurality of III-V compound semiconductor layers formed of a second III-V compound semiconductor material having a second band gap different from the first band gap; and
a third plurality of III-V compound semiconductor layers formed of a third III-V compound semiconductor material having a third band gap different from the first band gap and the second band gap, wherein the first, the second, and the third plurality of III-V compound semiconductor layers are stacked with an alternating pattern;
a gate dielectric on sidewalls and a top surface of the III-V compound semiconductor fin;
a gate electrode over the gate dielectric; and
a source region and a drain region connected to opposite ends of the III-V compound semiconductor fin.
10. The device of claim 9 , wherein the first and the second plurality of III-V compound semiconductor layers extend into the source region and the drain region.
11. The device of claim 9 further comprising shallow trench isolation (STI) regions in the semiconductor substrate and comprising sidewalls facing each other, wherein the III-V compound semiconductor fin is disposed over a region that is between the sidewalls of the STI regions.
12. The device of claim 9 further comprising a buffer layer under the III-V compound semiconductor fin, wherein the buffer layer comprises sidewalls contacting the sidewalls of the STI regions, and wherein the buffer layer has a lattice constant between a lattice constant of the semiconductor substrate and lattice constants of the first and the second III-V compound semiconductor materials.
13. The device of claim 12 , wherein the buffer layer comprises InGaAs.
14. The device of claim 9 , wherein the first III-V compound semiconductor material comprises AlAs, and the second III-V compound semiconductor material comprises InAs.
15. The device of claim 9 , wherein the source and drain regions of the FinFET comprise same III-V compound semiconductor materials as at least one of the first and the second plurality of III-V compound semiconductor layers.
16. The device of claim 9 , wherein the source and drain regions of the FinFET comprise a semiconductor material different from materials of the first and the second plurality of III-V compound semiconductor layers.
17. The device of claim 9 , wherein the first band gap and the second band gap have a difference greater than about 0.2 eV.