IP Library Granted Patent US 9,099,475
Granted Patent B2
US 9,099,475 · App. 13/611,076 · Granted Aug 4, 2015

Techniques for reducing inductance in through-die vias of an electronic assembly

Inventors: Michael B. McShane (Austin, TX); Kevin J. Hess (Austin, TX); Perry H. Pelley (Austin, TX); Tab A. Stephens (Austin, TX)
Assignee: Freescale Semiconductor, Inc.
H01L23/538H01L24/24H01L25/04H01L25/0657H01L24/16H01L24/32H01L24/73H01L24/82H01L2224/131H01L2224/16146H01L2224/245H01L2224/24146H01L2224/2518H01L2224/32135H01L2224/73217H01L2224/73259H01L2224/8203H01L2224/82101H01L2224/83H01L2224/9202H01L2224/92144H01L2224/94H01L2224/97
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Quick Facts
Patent No.
US 9,099,475
App. No.
13/611,076
Granted
Aug 4, 2015
Kind
B2
Abstract

An electronic assembly includes a processor die assembly, a first die assembly, and a second die assembly. The first die assembly is positioned on a first side of the processor die assembly. The second die assembly is positioned on a second side of the processor die assembly opposite the first side of the processor die assembly. Through-die vias couple the first and second die assemblies to the processor die assembly.

Claims (35)

1. An electronic assembly, comprising:

one or more processor die assemblies;

a plurality of non-processor die assemblies; and

through-die vias coupling the plurality of non-processor die assemblies to each of a respective one of the one or more processor die assemblies and wherein the through-die vias include power vias, ground vias, address vias, data vias, and control vias;

wherein each processor die assembly of the one or more processor die assemblies has an even number of a same type of the plurality of non-processor die assemblies symmetrically positioned on a first side of the processor die assembly and a second side of the processor die assembly.

2. The electronic assembly of claim 1 , wherein the through-die vias include through-silicon vias.

3. The electronic assembly of claim 1 , wherein the plurality of non-processor die assemblies includes four memory die in a stacked configuration.

4. The electronic assembly of claim 1 , wherein the through-die vias are at least partially filled with copper.

5. The electronic assembly of claim 1 , wherein the through-die vias are at least partially filled with aluminum.

6. The electronic assembly of claim 1 , wherein the plurality of non-processor die assemblies include an equal number of memory die and the through-die vias extend through the one or more processor die assemblies and the plurality of non-processor die assemblies.

7. The electronic assembly of claim 1 , wherein the one or more processor die assemblies only include a single processor die.

8. An electronic assembly, comprising:

a plurality of processor die assemblies;

a plurality of non-processor die assemblies; and

through-silicon vias coupling the plurality of non-processor die assemblies to the plurality of processor die assemblies and wherein the through-silicon vias include power vias, ground vias, address vias, data vias, and control vias;

wherein at least two processor die assemblies of the plurality of processor die assemblies are stacked back to back; and

wherein the at least two processor die assemblies, stacked back to back, have an even number of a same type of the plurality of non-processor die assemblies symmetrically positioned on a first side of the at least two processor die assemblies, stacked back to back, and a second side of the at least two processor die assemblies, stacked back to back.

9. The electronic assembly of claim 8 , wherein the plurality of non-processor die assemblies includes a plurality of memory die.

10. The electronic assembly of claim 8 , wherein the through-silicon vias are at least partially filled with copper.

11. The electronic assembly of claim 8 , wherein the through-silicon vias are at least partially filled with aluminum.

12. The electronic assembly of claim 8 , wherein the plurality of non-processor die assemblies include an equal number of memory die and the through-silicon vias extend through the at least two processor die assemblies, stacked back to back.

13. An electronic assembly, comprising:

one or more first processor die assemblies;

a plurality of non-processor die assemblies; and

first through-silicon vias coupling at least a first two non-processor die assemblies of the plurality of non-processor die assemblies to a first processor die assembly of the one or more processor die assemblies, wherein each of the at least first two non-processor die assemblies of the plurality of non-processor die assemblies include a respective memory die, and wherein the first through-silicon vias include power vias, ground vias, address vias, data vias, and control vias;

wherein each processor die assembly of the one or more processor die assemblies has an even number of a same type of the plurality of non-processor die assemblies symmetrically positioned on a first side of the processor die assembly and a second side of the processor die assembly.

14. The electronic assembly of claim 13 , wherein the first through-silicon vias are at least partially filled with copper or aluminum.

15. The electronic assembly of claim 13 ,

wherein the one or more processor die assemblies include a second processor die assembly, wherein the one or more processor die processor die assemblies are included within a single wafer;

the electronic assembly further comprising:

second through-silicon vias coupling at least a second two non-processor die assemblies of the plurality of non-processor die assemblies to the second processor die assembly, wherein each of the at least second two non-processor die assemblies of the plurality of non-processor die assemblies include a respective memory die, and wherein the second through-silicon vias include power vias, ground vias, address vias, data vias, and control vias.

16. The electronic assembly of claim 15 , wherein the first and second through-silicon vias are at least partially filled with a conductor.

17. The electronic assembly of claim 1 , wherein at least two of the plurality of non-processor die assemblies include at least one of synchronous dynamic random access memory (SRAM) and double data rate (DDR) memory.

18. The electronic assembly of claim 8 , wherein at least two of the plurality of non-processor die assemblies include at least one of synchronous dynamic random access memory (SRAM) and double data rate (DDR) memory.

19. The electronic assembly of claim 13 , wherein at least two of the plurality of non-processor die assemblies include at least one of synchronous dynamic random access memory (SRAM) and double data rate (DDR) memory.

Assignments (30)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042985 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042762 FRAME 0145. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051145/0184 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051030/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0387 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050745/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042762/0145 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042985/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
MERGER Recorded Jan 3, 2017
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 041144/0363 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Jul 14, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039361/0212 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
SECURITY AGREEMENT SUPPLEMENT Recorded Mar 7, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 038017/0058 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0652 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0614 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0633 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Apr 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030256/0471 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Apr 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
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SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Apr 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030256/0544 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2012
From: MCSHANE, MICHAEL B.; HESS, KEVIN J.; PELLEY, PERRY H.; STEPHENS, TAB A.
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 028941/0979 →
Continuity (1)
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