Amplification method for photoresist exposure in semiconductor chip manufacturing
View Patent ↗An electrical field is applied through an extreme ultraviolet (EUV) photoresist layer along a direction perpendicular to an interface between the EUV photoresist layer and an underlying layer. Secondary electrons and thermal electrons are accelerated along the direction of the electrical field, and travel with directionality before interacting with the photoresist material for a chemical reaction. The directionality increases the efficiency of electron photoacid capture, reducing the required EUV dose for exposure. Furthermore, this directionality reduces lateral diffusion of the secondary and thermal electrons, and thereby reduces blurring of the image and improves the image resolution of feature edges formed in the EUV photoresist layer. The electrical field may be generated by applying a direct current (DC) and/or alternating current (AC) bias voltage across an electrostatic chuck and a conductive plate placed over the EUV photoresist layer with a hole for passing the EUV radiation through.
1. A method of lithographically exposing an extreme ultraviolet (EUV) photoresist layer, said method comprising:
providing an lithography apparatus comprising a vacuum enclosure that contains an EUV source configured to emit an EUV beam, an EUV mask that includes lithographic patterns and is positioned in a path of said EUV beam such that after passing through said EUV mask a patterned EUV beam containing said lithographic patterns is formed, and a set of lenses configured to focus said patterned EUV beam to provide a focused patterned EUV beam;
disposing a substrate with an EUV photoresist layer thereupon on an electrically conductive chuck located in said vacuum enclosure;
disposing a conductive plate with a hole therein above said EUV photoresist layer, wherein said hole is configured to allow said focused patterned EUV beam to pass through so as to impinge directly onto said EUV photoresist layer; and
lithographically exposing said EUV photoresist layer at a dose that enables lithographic development of said EUV photoresist layer by irradiating portions of said EUV photoresist layer with said focused patterned EUV beam that passes through said hole in said conductive plate while an electrical field is applied across said conductive plate and said conductive chuck.
2. The method of claim 1 , wherein said conductive plate is spaced from a proximal surface of said EUV photoresist layer by a spacing.
3. The method of claim 2 , wherein said spacing is in a range from 0.2 mm to 5.0 mm.
4. The method of claim 2 , further comprising supplying hydrogen gas between said conductive plate and said proximal surface of said EUV photoresist layer, wherein said hydrogen gas is supplied in an amount such that an vacuum environment having a pressure ranging from 7.6×10 −4 Torr to 7.6×10 −10 Torr is maintained in said vacuum enclosure.
5. The method of claim 1 , wherein said electric field has a magnitude greater than 1 kV/cm during a time period during irradiation of said EUV photoresist layer with said focused patterned EUV beam.
6. The method of claim 5 , wherein said magnitude is in a range from 10 kV/cm to 1 MV/cm.
7. The method of claim 1 , wherein said electric field includes an alternating current (AC) electric field having a frequency greater than 1 Hz.
8. The method of claim 7 , wherein said frequency is in a range from 1 kHz to 100 MHz.
9. The method of claim 1 , wherein said electric field include a direct current (DC) electrical bias.
10. The method of claim 9 , wherein said DC electrical bias generates a DC electrical field having a magnitude greater than 1 kV/cm.
11. The method of claim 9 , wherein said electric field further includes an alternating current (AC) electric field having a peak electrical field magnitude greater than 1 kV/cm.
12. The method of claim 1 , further comprising moving said conductive chuck and said substrate after irradiation of said EUV photoresist layer with said focused patterned EUV beam.
13. The method of claim 1 , wherein said electrical field is predominantly along a direction perpendicular to a horizontal interface between a top surface of said substrate and a bottom surface of said EUV photoresist layer.
14. The method of claim 1 , wherein said electrical field is generated by applying an electrical voltage bias across said electrostatic chuck and said conductive plate.
15. The method of claim 1 , wherein said electrically conductive chuck is electrically shorted to said substrate.
16. The method of claim 1 , wherein said lithography apparatus further comprises a movable stage configured to move said substrate in directions perpendicular to said focused patterned EUV beam that impinges onto said EUV photoresist layer, and said method further comprises moving said electrically conductive chuck and said substrate employing said movable stage to select a location in said photoresist layer on which said focused patterned EUV beam impinges.