Methods of manufacturing and transferring larger-sized graphene
Example embodiments relate to methods of manufacturing and transferring a larger-sized graphene layer. A method of transferring a larger-sized graphene layer may include forming a graphene layer, a protection layer, and an adhesive layer on a substrate and removing the substrate. The graphene layer may be disposed on a transferring substrate by sliding the graphene layer onto the transferring substrate.
1. A method of transferring a larger-sized graphene, comprising:
forming a graphene layer on a substrate;
sequentially forming a protection layer and an adhesive layer on the graphene layer;
removing the substrate;
disposing the graphene layer on a transferring substrate with a contact solution layer; and
removing the adhesive layer and the protection layer,
wherein the disposing includes coating the contact solution layer on a surface of the transferring substrate, the surface facing the graphene layer; and sliding the graphene layer onto the transferring substrate via the contact solution layer.
2. The method of claim 1 , further comprising:
forming a catalyst layer on the substrate prior to forming the graphene layer.
3. The method of claim 2 , wherein removing the substrate includes:
weakening an adhesion between the catalyst layer and the substrate; and
separating the substrate from the catalyst layer, the graphene layer, the protection layer, and the adhesive layer.
4. The method of claim 3 , wherein weakening the adhesion between the catalyst layer and the substrate includes penetrating a hydrophilic liquid into a gap between the catalyst layer and the substrate.
5. The method of claim 2 , further comprising:
removing the catalyst layer after removing the substrate.
6. The method of claim 1 , wherein the protection layer includes a material selected from the group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), SiO x , and AlO x .
7. The method of claim 1 , wherein the adhesive layer includes a material selected from the group consisting of adhesive tape, glue, epoxy resin, thermal release tape, and water-soluble tape.
8. The method of claim 1 , wherein removing the substrate includes etching the substrate.
9. The method of claim 1 , wherein the contact solution layer includes a material selected from the group consisting of deionized water, isopropyl alcohol, ethanol, methanol, and mineral oil.
10. The method of claim 1 , further comprising:
evaporating the contact solution layer by heating the transferring substrate.
11. The method of claim 1 , further comprising:
cutting an exposed surface of the substrate to form a cutting line after forming the protection layer and the adhesive layer on the graphene layer; and
contacting a hydrophilic liquid to the cutting line.
12. The method of claim 11 , further comprising:
forming a catalyst layer on the substrate prior to forming the graphene layer; and
removing the catalyst layer after removing the substrate.
13. The method of claim 11 , wherein the adhesive layer includes a material selected from the group consisting of adhesive tape, glue, epoxy resin, thermal release tape, and water-soluble tape.
14. The method of claim 1 , wherein the graphene layer is formed on the substrate by chemical vapor deposition.
15. The method of claim 1 , wherein a majority of an upper surface of the transferring substrate is coated with the contact solution layer.
16. The method of claim 1 , wherein the graphene layer contacts the contact solution layer on the transferring substrate before contacting the transferring substrate.