Vitreous silica crucible provided with mineralizer on its inner surface and method of manufacturing silicon ingot using same
The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible in multi-pulling. According to the present invention, provided is a vitreous silica crucible for pulling a silicon single crystal, comprising a mineralizer on an inner surface of the crucible, wherein the mineralizer contains at least one atoms selected from the group consisting of Ca, Sr, Ba, Ra, Ti, Zr, Cr, Mo, Fe, Co, Ni, Cu, and Ag, and the concentration of the mineralizer on the inner surface is 1.0×10 5 to 1.0×10 17 atoms/cm 2 .
1. A vitreous silica crucible for pulling a silicon single crystal, comprising a mineralizer disposed only on an entire innermost surface of the crucible, wherein the mineralizer contains at least one atoms selected from the group consisting of Ca and Fe, and the concentration of the mineralizer on the inner surface is 1.0×10 8 to 3.0×10 11 atoms/cm 2 as measured by spraying a cleaning liquid for dissolving the mineralizer onto the inner surface to capture the mineralizer from the inner surface in an accumulated liquid at a bottom of the crucible, and determining the concentration of the mineralizer per cm 2 of the inner surface from a concentration of the mineralizer in the accumulated liquid.
2. A method of manufacturing a silicon ingot comprising the process of pulling a silicon ingot by melting polycrystalline silicon in the crucible of claim 1 .
3. The method of claim 2 , further comprising the process of, after the pulling, recharging and melting polycrystalline silicon therein, and pulling another silicon ingot.