Method of making flowcell with micro-fluid structure
A method of making a flowcell structure, the method comprising forming a first structure, forming a second structure and bonding the first structure to the second structure. Further, forming the first structure comprises forming one or more first bio-chemicals in a first substrate and printing a first glue layer on the first substrate. Forming the second structure comprises forming one or more second bio-chemicals in a second substrate.
1. A method of making a flowcell structure, the method comprising:
forming a first structure, wherein forming the first structure comprises:
forming one or more first bio-chemicals in a first substrate; and
printing a first glue layer on the first substrate;
forming a second structure, wherein forming the second structure comprises forming one or more second bio-chemicals in a second substrate; and
bonding the first structure to the second structure.
2. The method of claim 1 , wherein forming one or more first bio-chemicals in the first substrate comprises:
forming one or more patterned wells in the first substrate; and
forming one or more first bio-chemicals in the patterned wells.
3. The method of claim 1 , further comprising forming a first opening in the first substrate.
4. The method of claim 3 , wherein forming the first opening in the first substrate comprises a laser drilling process.
5. The method of claim 1 , wherein forming the second structure further comprises printing a second glue layer on the second substrate.
6. The method of claim 1 , wherein forming one or more second bio-chemicals in the second substrate comprises:
forming one or more patterned wells in the second substrate; and
forming one or more second bio-chemicals in the patterned wells.
7. The method of claim 5 , further comprising placing a base film on the second glue layer.
8. The method of claim 7 , further comprising:
cutting the base film; and
removing a portion of the base film.
9. The method of claim 7 , further comprising forming a third glue layer on the base film.
10. The method of claim 1 , wherein bonding the first structure to the second structure comprises a bonding operating temperature less than or equal to 100 degrees Celsius.
11. A method of making a flowcell structure, the method comprising:
forming a first structure, wherein forming the first structure comprises:
forming one or more first bio-chemicals in a first substrate; and
forming a first opening in the first substrate;
forming a second structure, wherein forming the second structure comprises forming one or more second bio-chemicals in a second substrate; and
bonding the first structure to the second structure.
12. The method of claim 11 , wherein forming one or more second bio-chemicals in the second substrate comprises:
forming one or more patterned wells in the second substrate; and
forming one or more second bio-chemicals in the patterned wells.
13. The method of claim 11 , further comprising:
cutting a third structure, wherein the third structure comprises:
a base film between a first adhesive layer and a second adhesive layer;
a liner portion on the first adhesive layer or the second adhesive layer; and
removing a portion of the third structure.
14. The method of claim 13 , further comprising removing the liner portion from the third structure.
15. The method of claim 14 , further comprising:
aligning the third structure with the second substrate; and
bonding the third structure to the second substrate.
16. The method of claim 11 , wherein bonding the first structure to the second structure comprises a bonding operating temperature less than or equal to 100 degrees Celsius.
17. The method of claim 11 , wherein bonding the first structure to the second structure comprises a bonding operating temperature ranging from about 50 degrees Celsius to about 100 degrees Celsius.
18. A method of making a flowcell structure, the method comprising:
forming a first structure, wherein forming the first structure comprises:
forming one or more first bio-chemicals in a first substrate; and
forming a first opening and a second opening in the first substrate;
forming a second structure, wherein forming the second structure comprises forming one or more second bio-chemicals in a second substrate; and
bonding the first structure to the second structure, wherein bonding the first structure to the second structure comprises a bonding operating temperature less than or equal to 100 degrees Celsius.
19. The method of claim 18 , wherein the bonding operating temperature ranges from about 50 degrees Celsius to about 100 degrees Celsius.
20. The method of claim 18 , further comprising:
cutting a base film, wherein the base film is between a first adhesive layer and a second adhesive layer; and
placing the base film on the second structure.