Probe
Disclosed is a probe which stably transmits a test signal. The probe electrically connects a semiconductor device and a tester for testing the semiconductor device. The probe may include an upper plunger which is configured to be electrically connected to the semiconductor device; a lower plunger which is configured to be electrically connected to the tester; an elastic member which is disposed between the upper plunger and the lower plunger, and elastically biases the upper and lower plungers to have them spaced from each other; a conductive member which is disposed in an inside or outside of the elastic member and electrically connects the upper plunger and the lower plunger; and a barrel which accommodates therein the upper plunger, the lower plunger, the elastic member and the conductive member.
1. A probe which electrically connects a semiconductor device and a tester for testing the semiconductor device, the probe comprising:
an upper plunger which is configured to be electrically connected to the semiconductor device;
a lower plunger which is configured to be electrically connected to the tester;
an elastic member which is disposed between the upper plunger and the lower plunger, and elastically biases the upper and lower plungers to have them spaced from each other;
a conductive member which is disposed in an inside or outside of the elastic member and electrically connects the upper plunger and the lower plunger; and
a barrel which accommodates therein the upper plunger, the lower plunger, the elastic member and the conductive member,
wherein upon non-testing, the conductive member is not contacted with one of the upper plunger and the lower plunger,
wherein upon testing, the conductive member is contacted with the upper plunger and the lower plunger so that a conductive path is formed among the upper plunger, the conductive member and the lower plunger.
2. The probe according to claim 1 , wherein the conductive member electrically connects the upper and lower plungers only when at least one of the upper plunger and the lower plunger moves toward the other one of the upper plunger and the lower plunger.
3. The probe according to claim 1 , wherein the conductive member selectively contacts at least one of the upper plunger and the lower plunger.
4. The probe according to claim 3 , wherein the conductive member applies an elastic force to at least one of the upper plunger and the lower plunger to have them spaced from each other.
5. The probe according to claim 4 , wherein the conductive member comprises at least one of a conductive coil spring and a conductive rubber.