Magnetic core inductor (MCI) structures for integrated voltage regulators
Semiconductor packages including magnetic core inductor (MCI) structures for integrated voltage regulators are described. In an example, a semiconductor package includes a package substrate and a semiconductor die coupled to a first surface of the package substrate. The semiconductor die has a first plurality of metal-insulator-metal (MIM) capacitor layers thereon. The semiconductor package also includes a magnetic core inductor (MCI) die coupled to a second surface of the package substrate. The MCI die includes one or more slotted inductors and has a second plurality of MIM capacitor layers thereon.
1. A semiconductor package, comprising:
a package substrate;
a semiconductor die coupled to a first surface of the package substrate, the semiconductor die having a first plurality of metal-insulator-metal (MIM) capacitor layers thereon; and
a magnetic core inductor (MCI) die coupled to a second surface of the package substrate, the MCI die comprising one or more slotted inductors and having a second plurality of MIM capacitor layers thereon.
2. The semiconductor package of claim 1 , wherein each of the one or more slotted inductors of the MCI die comprises a plurality of magnetic layers, and wherein all the magnetic layers of the plurality of magnetic layers are slotted with a regular pattern.
3. The semiconductor package of claim 1 , wherein each of the one or more slotted inductors of the MCI die comprises a plurality of magnetic layers, and wherein all the magnetic layers of the plurality of magnetic layers are slotted with an irregular pattern.
4. The semiconductor package of claim 1 , wherein each of the one or more slotted inductors of the MCI die comprises a plurality of magnetic layers, and wherein only a portion of, but not all of, the magnetic layers of the plurality of magnetic layers are slotted.
5. The semiconductor package of claim 1 , wherein the one or more slotted inductors, the first plurality of MIM capacitor layers, and the second plurality of MIM capacitor layers form a portion of an integrated voltage regulator for the semiconductor die.
6. The semiconductor package of claim 1 , wherein the first plurality of MIM capacitor layers of the semiconductor die are proximate to the first surface of the package substrate, and wherein the semiconductor die is coupled to the package substrate by a first plurality of contacts.
7. The semiconductor package of claim 6 , wherein the second plurality of MIM capacitor layers of the MCI die are proximate to the second surface of the package substrate, and wherein the MCI die is coupled to the package substrate by a second plurality of contacts.
8. The semiconductor package of claim 7 , wherein the first and second pluralities of contacts are electrically coupled by interconnects of the package substrate.
9. The semiconductor package of claim 1 , wherein the first and second surfaces are on opposing sides of the package substrate.
10. The semiconductor package of claim 1 , wherein the first and second surfaces are on a same side of the package substrate.
11. The semiconductor package of claim 1 , wherein both the semiconductor die and the MCI die are flip-chip bonded to the package substrate.
12. The semiconductor package of claim 1 , wherein the package substrate is a bumpless build-up layer (BBUL) substrate.
13. The semiconductor package of claim 1 , wherein the semiconductor die and the magnetic core inductor die are housed in a core of the package substrate.
14. The semiconductor package of claim 1 , wherein the package substrate is a coreless substrate.
15. A magnetic core inductor (MCI) die, comprising:
a substrate;
one or more slotted inductors disposed above the substrate comprising a plurality of magnetic lavers; and
a plurality of metal-insulator-metal (MIM) capacitor layers disposed above the one or more slotted inductors.
16. The MCI die of claim 15 , wherein each of the one or more slotted inductors comprising the plurality of magnetic layers, and wherein all the magnetic layers of the plurality of magnetic layers are slotted with a regular pattern.
17. The MCI die of claim 15 , wherein each of the one or more slotted inductors comprising the plurality of magnetic layers, and wherein all the magnetic layers of the plurality of magnetic layers are slotted with an irregular pattern.
18. The MCI die of claim 15 , wherein each of the one or more slotted inductors comprising the plurality of magnetic layers, and wherein only a portion of, but not all of, the magnetic layers of the plurality of magnetic layers are slotted.