Thin-film transistor array substrate, organic light-emitting display having the same, and method of manufacturing the organic light-emitting display

1. A method of manufacturing an organic light-emitting display, the method comprising:

performing a first mask process which comprises forming a buffer layer and a semiconductor layer on a substrate, and an active layer of a thin-film transistor and a lower electrode of a capacitor by patterning the semiconductor layer;

performing a second mask process which comprises i) forming a first insulating layer covering the active layer and the lower electrode on the substrate, ii) sequentially stacking a transparent conductive material and a first metal on the first insulating layer, and iii) forming a gate electrode, a first electrode pattern configured to form a pixel electrode and a second electrode pattern configured to form an upper electrode of the capacitor by patterning the transparent conductive material and the first metal;

performing a third mask process which comprises i) forming a second insulating layer on the substrate on which the gate electrode, the first electrode pattern, and the second electrode pattern, and ii) forming a first gap at peripherals of the first electrode pattern while forming an opening that exposes source and drain regions of the active layer, the first electrode pattern, and the second electrode pattern by patterning the second insulating layer;

performing a fourth mask process which comprises i) forming a second metal on the substrate on which the second insulating layer is formed, source and drain electrodes that connect the source and drain regions by patterning the second metal, and ii) removing the first metal on the pixel electrode and the upper electrode; and

performing a fifth mask process which comprises i) forming a third insulating layer on the resultant structure of the fourth mask process, and ii) exposing the pixel electrode by forming an opening greater than the opening formed in the second insulating layer by patterning the third insulating layer.

2. The method of claim 1 , further comprising doping the source and drain regions of the active layer after performing the second mask process.

3. The method of claim 1 , wherein the third mask process comprises forming substantially the same etch surface by substantially simultaneously etching the buffer layer, the first insulating layer, and the second insulating layer while forming the opening that exposes the first electrode pattern by patterning the second insulating layer, and forming the first gap between the etch surface and outer side-surfaces of the first electrode pattern.

4. The method of claim 1 , wherein the third mask process comprises i) forming substantially the same etch surface by substantially simultaneously etching the first insulating layer and the second insulating layer while forming the opening that exposes the second electrode pattern by patterning the second insulating layer, and ii) forming a second gap between the etch surface and outer side-surfaces of the second electrode pattern.

5. The method of claim 1 , wherein the fourth mask process comprises a first etching process configured to etch the second metal and a second etching process configured to remove the first metal on the pixel electrode and the upper electrode.

6. The method of claim 1 , wherein the fourth mask process comprises forming the second metal using the same metal used to form the first metal, and substantially simultaneously etching the first and second metals.

7. The method of claim 1 , further comprising doping the lower electrode of the capacitor after performing the fourth mask process.

8. The method of claim 1 , wherein the fifth mask process comprises covering a portion of the pixel electrode that is connected to one of the source and drain electrodes with the third insulating layer.

9. The method of claim 1 , further comprising, after performing the fifth mask process,

forming an intermediate layer having a light-emitting layer to cover an upper side and outer side-surfaces of the pixel electrode; and

forming a facing electrode on the upper side and the outer side-surfaces of the pixel electrode to cover the intermediate layer and the first gap formed at the peripherals of the pixel electrode.