Manufacturing method of semiconductor device and semiconductor device
A step of forming a stacked film serving as a lower electrode, a step of forming an insulating film serving as a capacitive film on the stacked film, and a step of patterning the insulating film and the stacked film are performed. In the step of forming the stacked film, a film containing titanium, a film containing titanium and nitrogen, a main conductive film containing aluminum, a film containing titanium, and a film containing titanium and nitrogen are sequentially formed from below. The ratio of the surface roughness of the upper surface of the stacked film to the thickness of the insulating film is 14% or less.
1. A manufacturing method of a semiconductor device comprising:
(a) a step of preparing a semiconductor substrate;
(b) a step of forming a first insulating film on the semiconductor substrate;
(c) a step of forming a first conductive film on the first insulating film;
(d) a step of forming a second insulating film on the first conductive film;
(e) a step of forming a second conductive film on the second insulating film;
(f) a step of forming a first electrode made of the second conductive film by patterning the second conductive film; and
(g) after the step (f), a step of forming a capacitive film made of the second insulating film and disposed under the first electrode and a second electrode made of the first conductive film and disposed under the capacitive film by patterning the second insulating film and the first conductive film,
wherein, in the step (g), a capacitive element is formed from the first electrode, the capacitive film, and the second electrode,
the step (c) includes:
(c1) a step of forming a first film containing titanium on the first insulating film;
(c2) a step of forming a second film containing titanium and nitrogen on the first film;
(c3) a step of forming a third film containing aluminum on the second film;
(c4) a step of forming a fourth film containing titanium on the third film; and
(c5) a step of forming a fifth film containing titanium and nitrogen on the fourth film,
in the step (c), the first conductive film composed of the first film, the second film, the third film, the fourth film, and the fifth film is formed by performing the step (c1), the step (c2), the step (c3), the step (c4), and the step (c5), and
a ratio of a surface roughness of an upper surface of the first conductive film to a thickness of the second insulating film is 14% or less.
2. The manufacturing method of a semiconductor device according to claim 1 ,
wherein, in the step (c1), the first film made of a titanium film is formed by a sputtering method,
in the step (c2), the second film made of a titanium nitride film is formed by the sputtering method, and
in the step (c3), the third film made of an alloy film containing aluminum as a main component is formed by the sputtering method and a film formation rate of the third film is 1,000 nm/min or more.
3. The manufacturing method of a semiconductor device according to claim 2 ,
wherein a value obtained by dividing an X-ray diffraction intensity of a (111) plane of the third film by a thickness of the third film is 200 cps/nm or more.
4. The manufacturing method of a semiconductor device according to claim 1 ,
wherein, in the step (g), a wiring made of the first conductive film is formed away from the second electrode.
5. The manufacturing method of a semiconductor device according to claim 1 ,
wherein, in the step (d), the second insulating film made of one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film is formed by a plasma CVD method.
6. The manufacturing method of a semiconductor device according to claim 1 ,
wherein, in the step (e), the second conductive film made of one of a titanium film, a titanium nitride film, a tantalum nitride film, and an aluminum film is formed.
7. A manufacturing method of a semiconductor device comprising:
(a) a step of preparing a semiconductor substrate;
(b) a step of forming a first insulating film on the semiconductor substrate;
(c) a step of forming a first conductive film on the first insulating film;
(d) a step of forming a first electrode made of the first conductive film by patterning the first conductive film;
(e) a step of forming a second insulating film on the first electrode;
(f) a step of forming an opening portion reaching the first electrode through the second insulating film;
(g) a step of forming a third insulating film on the first electrode exposed in the opening portion and the second insulating film;
(h) a step of forming a second conductive film on the third insulating film; and
(i) a step of forming a capacitive film made of the third insulating film and disposed on the first electrode and a second electrode made of the second conductive film and disposed on the capacitive film by patterning the second conductive film and the third insulating film,
wherein, in the step (i), a capacitive element is formed from the first electrode, the capacitive film, and the second electrode,
the step (c) includes:
(c1) a step of forming a first film containing titanium on the first insulating film;
(c2) a step of forming a second film containing titanium and nitrogen on the first film;
(c3) a step of forming a third film containing aluminum on the second film;
(c4) a step of forming a fourth film containing titanium on the third film; and
(c5) a step of forming a fifth film containing titanium and nitrogen on the fourth film,
in the step (c), the first conductive film composed of the first film, the second film, the third film, the fourth film, and the fifth film is formed by performing the step (c1), the step (c2), the step (c3), the step (c4), and the step (c5), and
a ratio of a surface roughness of an upper surface of the first conductive film to a thickness of the third insulating film is 14% or less.
8. The manufacturing method of a semiconductor device according to claim 7 ,
wherein, in the step (c1), the first film made of a titanium film is formed by a sputtering method,
in the step (c2), the second film made of a titanium nitride film is formed by the sputtering method, and
in the step (c3), the third film made of an alloy film containing aluminum as a main component is formed by the sputtering method and a film formation rate of the third film is 1,000 nm/min or more.
9. The manufacturing method of a semiconductor device according to claim 8 ,
wherein a value obtained by dividing an X-ray diffraction intensity of a (111) plane of the third film by a thickness of the third film is 200 cps/nm or more.
10. The manufacturing method of a semiconductor device according to claim 7 ,
wherein, in the step (d), a wiring made of the first conductive film is formed away from the first electrode, and
in the step (e), the second insulating film is formed on the wiring.
11. The manufacturing method of a semiconductor device according to claim 7 ,
wherein, in the step (g), the third insulating film made of one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film is formed by a plasma CVD method.
12. The manufacturing method of a semiconductor device according to claim 10 ,
wherein, in the step (h), the second conductive film made of one of a titanium film, a titanium nitride film, a tantalum nitride film, and an aluminum film is formed in a layer higher than the wiring.