Method to fabricate a vertical transistor having an asymmetric gate with two conductive layers having different work functions
A transistor structure is formed to include a substrate and, overlying the substrate, a source; a drain; and a channel disposed vertically between the source and the drain. The channel is coupled to a gate conductor that surrounds the channel via a layer of gate dielectric material that surrounds the channel. The gate conductor is composed of a first electrically conductive material having a first work function that surrounds a first portion of a length of the channel and a second electrically conductive material having a second work function that surrounds a second portion of the length of the channel. A method to fabricate the transistor structure is also disclosed. The transistor structure can be characterized as being a vertical field effect transistor having an asymmetric gate.
1. A method to fabricate a transistor structure, comprising:
providing a substrate;
forming by epitaxial growth upon a surface of said substrate a three layer stack structure comprised of a source comprised of a first layer of semiconductor material, a drain comprised o fa second layer of semiconductor material and a channel that is disposed vertically between said source and said drain, said channel being comprised of a third layer of semiconductor material disposed above and perpendicular with respect to said surface of said substrate between a first surface of said first layer of semiconductor material of said source and a first surface of said second layer of semiconductor material of said drain;
forming a gate dielectric layer over at least sidewalls of said channel; and
forming a gate conductor that surrounds said channel and said gate dielectric layer, where said gate conductor is formed so as to comprise a first layer of first electrically conductive material having a first work function that surrounds a first portion of a length of said channel and a second layer of second electrically conductive material having a second work function that surrounds a second portion of the length of said channel, where said first layer of first electrically conductive material and said second layer of second electrically conductive material are disposed vertically adjacent to one another, relative to the surface of said substrate, one above the other and together surround the length of said channel, the method further comprising,
forming a layer of dielectric material having a bottom surface disposed on and overlying a second surface of one of said first layer of semiconductor material or said second layer of semiconductor material in dependence on whether said source or said drain is disposed vertically above the channel, where said layer of gate dielectric material is disposed on a top surface of said layer of dielectric material and on side surfaces of said layer of dielectric material, and
forming an electrical contact through a portion of said layer of gate dielectric material that is disposed on the top surface of said layer of dielectric material, said electrical contact also being formed through said layer of dielectric material;
the step of forming the gate conductor comprising
blanket depositing the first electrically conductive material so as to surround said channel and said gate dielectric layer that is disposed on the sidewalls of said channel;
selectively removing a portion of the first electrically conductive material so that a remaining thickness of the first electrically conductive material comprises the first layer of first electrically conductive material that surrounds a lower, first length of the channel, where selectively removing exposes a portion of said gate dielectric layer that is disposed on an upper, second length of said channel and exposes a top surface of the first layer of first electrically conductive material;
blanket depositing the second electrically conductive material on the exposed top surface of the first layer of first electrically conductive material so as to cover the first layer of first electrically conductive material and to surround the exposed portion of said gate dielectric layer that is disposed on the upper, second length of said channel; and
selectively removing a portion of the second electrically conductive material so that a remaining thickness of said second electrically conductive material comprises the second layer of the second electrically conductive material that surrounds the second length of the channel.
2. The method as in claim 1 , where the first and the second portion of the length are each about 50% of the length of the channel.
3. The method as in claim 1 , where said first work function is about 5.1 eV, and where said second work function is about 4.1 eV.
4. The method as in claim 1 , where the transistor is an n-type of field effect transistor, and where said first layer of first electrically conductive material has a work function that is greater than a work function of said second layer of second electrically conductive material and is formed so as to be disposed nearer to said source than said second layer of second electrically conductive material.
5. The method as in claim 1 , where the transistor is a p-type of field effect transistor, and where said first layer of first electrically conductive material has a work function that is greater than a work function of said second and is formed so as to be disposed nearer to said drain than said second layer of second electrically conductive material.
6. The method as in claim 1 , where said gate dielectric material is formed so as to be comprised of SiO 2 or SiON.
7. The method as in claim 1 , where said gate dielectric material is formed to be comprised of a high dielectric constant material comprised of at least one of HfO 2 , ZrO 2 , La 2 O 3 , Al 2 O 3 , TiO 2 , SrTiO 3 , LaAlO 3 , Y 2 O 3 , HfO x N y , ZrO x N y , La 2 O x N y , Al 2 O x N y , TiO x N y , SrTiO x N y , LaAlO x N y , Y 2 O x N y , a silicate thereof, and an alloy thereof, where each value of x is independently from 0.5 to 3 and each value of y is independently from 0 to 2.
8. The method as in claim 1 , where the length of said channel is about 40 nm or less.
9. The method as in claim 1 , where said first layer of first electrically conductive material having the first work function is comprised of tungsten, and where said second layer of second electrically conductive material is comprised of one of tungsten nitride or aluminum.
10. The method as in claim 1 , further comprising an initial step of forming a source contact layer so as to be interposed between said first layer of semiconductor material and said surface of said substrate.
11. The method as in claim 1 , where the lower, first length of the channel and the upper, second length of the channel are each about 50% of the length of the channel.
12. A method to fabricate a transistor structure, comprising:
providing a substrate;
forming by epitaxial growth upon a surface of said substrate a three layer stack structure comprised of a source comprised of a first layer of semiconductor material, a drain comprised of a second layer of semiconductor material and a channel that is disposed vertically between said source and said drain, said channel being comprised of a third layer of semiconductor material disposed above and perpendicular with respect to said surface of said substrate between a first surface of said first layer of semiconductor material of said source and a first surface of said second layer of semiconductor material of said drain;
forming a gate dielectric layer over at least sidewalls of said channel; and
forming a gate conductor that surrounds said channel and said gate dielectric layer, where said gate conductor is formed so as to comprise a first layer of first electrically conductive material having a first work function that surrounds a first portion of a length of said channel and a second layer of second electrically conductive material having a second work function that surrounds a second portion of the length of said channel, where said first layer of first electrically conductive material and said second layer of second electrically conductive material are disposed vertically adjacent to one, relative to the surface of said substrate, another one above the other and together surround the length of said channel, the step of forming the gate conductor further comprising,
blanket depositing the first electrically conductive material so as to surround said channel and said gate dielectric layer that is disposed on the sidewalls of said channel;
selectively removing a portion of the first electrically conductive material so that a remaining thickness of the first electrically conductive material comprises the first layer of first electrically conductive material that surrounds a lower, first length of the channel, where selectively removing exposes a portion of said gate dielectric layer that is disposed on an upper, second length of said channel and exposes a top surface of the first layer of first electrically conductive material;
blanket depositing the second electrically conductive material on the exposed top surface of the first layer of first electrically conductive material so as to cover the first layer of first electrically conductive material and to surround the exposed portion of said gate dielectric layer that is disposed on the upper, second length of said channel; and
selectively removing a portion of the second electrically conductive material so that a remaining thickness of said second electrically conductive material comprises the second layer of the second electrically conductive material that surrounds the second length of the channel.
13. The method as in claim 12 , where the lower, first length of the channel and the upper, second length of the channel are each about 50% of the length of the channel.
14. The method as in claim 12 , further comprising:
forming a layer of dielectric material having a bottom surface disposed on and overlying a second surface of one of said first layer of semiconductor material or said second layer of semiconductor material in dependence on whether said source or said drain is disposed vertically above the channel, where said layer of gate dielectric material is disposed on a top surface of said layer of dielectric material and on side surfaces of said layer of dielectric material, and
forming an electrical contact through a portion of said layer of gate dielectric material that is disposed on the top surface of said layer of dielectric material, said electrical contact also being formed through said layer of dielectric material.
15. The method as in claim 12 , where the first work function is about 5.1 eV, and where the second work function is about 4.1 eV.
16. The method as in claim 12 , where the transistor is an n-type of field effect transistor, and where said first layer of first electrically conductive material has a work function that is greater than a work function of said second layer of second electrically conductive material and is formed so as to be disposed nearer to said source than said second layer of second electrically conductive material.
17. The method as in claim 12 , where the transistor is a p-type of field effect transistor, and where said first layer of first electrically conductive material has a work function that is greater than a work function o f said second layer of second electrically conductive material and is formed so as to be disposed nearer to said drain than said second layer of second electrically conductive material.
18. The method as in claim 12 , where said gate dielectric material is formed so as to be comprised of SiO 2 or SiON or a high dielectric constant material comprised of at least one of HfO 2 , ZrO 2 , La 2 O 3 , Al 2 O 3 , TiO 2 , SrTiO 3 , LaAlO 3 , Y 2 O 3 , HfO x N y , ZrO x N y , La 2 O x N y , Al 2 O x N y , TiO x N y , SrTiO x N y , LaAlO x N y , Y 2 O x N y , a silicate thereof, and an alloy thereof, where each value of x is independently from 0.5 to 3 and each value of y is independently from 0 to 2.
19. The method as in claim 12 , further comprising an initial step of forming a contact layer so as to be interposed between said first layer of semiconductor material and said surface of said substrate, said contact layer being conductively coupled to said first layer of semiconductor material.