Pressure transducer substrate with self alignment feature
In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
1. An apparatus comprising:
a first circularly-shaped substrate having:
a first side for accommodating a first diaphragm and a second side, the second side including a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second circularly-shaped substrate, and
a supporting area contained in the polygonal-shaped depression, the supporting area providing support for the second diaphragm when a first assembly containing the first circularly-shaped substrate and a second assembly containing the second diaphragm and the second circularly-shaped substrate are stacked.
2. The apparatus of claim 1 , further comprising:
the first diaphragm.
3. The apparatus of claim 2 , wherein the first diaphragm is polygonal shaped.
4. The apparatus of claim 1 , wherein the supporting area is shaped as a ring.
5. The apparatus of claim 1 , wherein the first substrate is included in a pressure transducer.
6. The apparatus of claim 5 , wherein the pressure transducer is an automotive pressure transducer (APT).
7. An apparatus comprising:
a first circularly-shaped substrate having a first side for accommodating a first diaphragm and a second side, the second side including a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second circularly-shaped substrate, and
a protrusion on the first side, the protrusion providing a platform for the first diaphragm.
8. The apparatus of claim 7 , wherein the protrusion is polygonal shaped.
9. The apparatus of claim 7 , further comprising:
the first diaphragm,
wherein the first diaphragm is bonded to the protrusion.
10. The apparatus of claim 9 , wherein the first diaphragm is bonded to the protrusion using a sealing glass.
11. The apparatus of claim 7 , wherein the first substrate is included in a pressure transducer.
12. The apparatus of claim 11 , wherein the pressure transducer is an automotive pressure transducer (APT).