EUV mask
An EUV exposure apparatus according to embodiments includes a reticle stage which suctions a rear surface side of an EUV mask to retain the EUV mask. In addition, the EUV exposure apparatus includes a detection unit which detects a position of a measurement mark formed on the rear surface of the EUV mask in the state where the EUV mask is suctioned on the reticle stage. In addition, the EUV exposure apparatus includes a control unit which calculates a distortion amount of the EUV mask based on the position of the measurement mark and performs exposure control on a wafer while correcting the distortion amount.
1. An EUV mask comprising:
a circuit pattern that is formed on a front surface side of the EUV mask opposite to a surface side of the EUV mask suctioned on a reticle stage; and
a measurement mark that is formed on a rear surface side of the EUV mask that is the surface side suctioned on the reticle stage and of which position is detected in a state in which the EUV mask is suctioned on the reticle stage,
wherein a plurality of the measurement marks are arranged, at equal intervals in a first direction and in a second direction, on an entire surface of the rear surface side of the EUV mask.
2. The EUV mask according to claim 1 , further comprising a metal film which is formed on the rear surface side of the EUV mask and is suctioned on the reticle stage,
wherein the measurement mark is formed by cutting the metal film.
3. The EUV mask according to claim 1 , further comprising a suction portion which is formed in an outer periphery portion of the rear surface side of the EUV mask to be suctioned on the reticle stage,
wherein the measurement mark is arranged inside the suction portion.
4. The EUV mask according to claim 3 , further comprising a metal film that is formed on the rear surface side of the EUV mask,
wherein the measurement mark is formed on an outer layer side of the metal film by using a member different from that of the metal film.
5. The EUV mask according to claim 1 , wherein the measurement mark has a shape of a combination of one or more pairs of two perpendicular straight-line patterns.