Integrated circuit device
An integrated circuit device includes a substrate, at least one transistor, at least one metal layer, a conductive pillar, and a connecting structure. The substrate has at least one via passing therethrough. The transistor is at least partially disposed in the substrate. The metal layer is disposed on or above the substrate. The conductive pillar is disposed in the via. The connecting structure is at least partially disposed in the via and connecting the conductive pillar and the metal layer. At least a first portion of the connecting structure is made of a stress releasing material having a coefficient of thermal expansion less than a coefficient of thermal expansion of the conductive pillar. A projection of the transistor in the via overlaps with the connecting structure.
1. An integrated circuit device, comprising:
a substrate having at least one via passing therethrough;
at least one transistor at least partially disposed in the substrate;
at least one metal layer disposed on or above the substrate;
a conductive pillar disposed in the via; and
a connecting structure at least partially disposed in the via and connecting the conductive pillar and the metal layer, wherein a diameter of the conductive pillar is substantially the same as a diameter of the connecting structure, the entire connecting structure is made of a stress releasing material having a coefficient of thermal expansion less than a coefficient of thermal expansion of the conductive pillar, a projection of the transistor in the via overlaps with the connecting structure, and the connecting structure comprises:
a first portion made of oxide; and
a second portion connecting the conductive pillar and the metal layer, and the second portion is made of a conductive material.
2. The integrated circuit device of claim 1 , wherein the coefficient of thermal expansion of the first portion of the connecting structure is further greater than or equal to a coefficient of thermal expansion of the substrate.
3. The integrated circuit device of claim 1 , wherein the second portion of the connecting structure is surrounded by the first portion of the connecting structure.
4. The integrated circuit device of claim 1 , wherein the second portion of the connecting structure is made of tungsten (W).
5. The integrated circuit device of claim 1 , further comprising:
an insulating layer disposed in the via and surrounding the connecting structure and the conductive pillar.
6. An integrated circuit device, comprising:
a substrate having at least one via passing therethrough;
at least one transistor disposed in the substrate;
at least one metal layer disposed on or above the substrate; and
a conductive pillar disposed in the via; and
a connecting structure disposed in the via, and the connecting structure comprising:
a connecting portion electrically connected to the metal layer and disposed in the via; and
a neck portion disposed between the connecting portion and the conductive pillar, wherein the neck portion is narrower than the connecting portion, the conductive pillar, the neck portion, and the connecting portion are sequentially arranged along an extension direction of the via, and a projection of the transistor in the via overlaps with the neck portion.
7. The integrated circuit device of claim 6 , wherein the neck portion is pillar-shaped.
8. The integrated circuit device of claim 6 , wherein the neck portion gets narrower towards the connecting portion.
9. The integrated circuit device of claim 6 , wherein the neck portion gets narrower towards the conductive pillar.
10. The integrated circuit device of claim 6 , wherein the neck portion is curved inwards in the middle of the neck portion.
11. The integrated circuit device of claim 6 , wherein the neck portion, the connecting portion, and the conductive pillar are all made of the same material.
12. The integrated circuit device of claim 6 , wherein the connecting structure has a coefficient of thermal expansion less than a coefficient of thermal expansion of the conductive pillar.
13. The integrated circuit device of claim 6 , wherein the connecting structure is made of tungsten (W), and the conductive pillar is made of copper (Cu).
14. The integrated circuit device of claim 6 , further comprising:
an insulating layer disposed in the via and surrounding the conductive pillar and the connecting structure.