Hall sensor arrangement for the redundant measurement of a magnetic field
In various embodiments, a Hall sensor arrangement for the redundant measurement of a magnetic field may include a first Hall sensor on a top side of a first semiconductor substrate; a second Hall sensor on a top side of a second semiconductor substrate; a carrier having a top side and an underside; wherein the first Hall sensor is arranged on the top side of the carrier and the second Hall sensor is arranged on the underside of the carrier; and wherein the measuring area of the first Hall sensor projected perpendicularly onto the carrier at least partly overlaps the measuring area of the second Hall sensor projected perpendicularly onto the carrier.
1. A Hall sensor arrangement for the redundant measurement of a magnetic field, the Hall sensor arrangement comprising:
a first Hall sensor on a top side of a first semiconductor substrate;
a second Hall sensor on a top side of a second semiconductor substrate;
a carrier having a top side and an underside;
wherein the first Hall sensor is arranged on the top side of the carrier and the second Hall sensor is arranged on the underside of the carrier; and
wherein the measuring area of the first Hall sensor projected perpendicularly onto the carrier substantially completely overlaps the measuring area of the second Hall sensor projected perpendicularly onto the carrier providing redundant measurement of the magnetic field component perpendicular to the carrier.
2. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein a moulding compound completely encloses the first Hall sensor and the second Hall sensor.
3. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 2 , wherein the moulding compound completely enclosing the first Hall sensor and the second Hall sensor has a thickness that is substantially equal on the topside and the underside of the carrier, respectively, to provide a substantially thermomechanically balanced housing.
4. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the first and the second semiconductor substrate have an integrated circuit.
5. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 4 , wherein the Hall sensor arrangement has contact strips; and wherein the integrated circuit of the first semiconductor substrate and the integrated circuit of the second semiconductor substrate are independently connected to dedicated contact strips.
6. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 5 , further comprising:
a housing, wherein the contact strips of the first semiconductor substrate are arranged in a manner lying opposite the contact strips of the second semiconductor substrate on the housing.
7. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 4 , wherein the Hall sensor arrangement has contact strips; and wherein the first Hall sensor and the second Hall sensor are independently connected to dedicated contact strips.
8. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 4 , wherein the Hall sensor arrangement has contact strips; and wherein the first Hall sensor, the second Hall sensor, the integrated circuit of the first semiconductor substrate, and the integrated circuit of the second semiconductor substrate, are independently connected to dedicated contact strips.
9. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 4 , wherein a Hall signal from the first Hall sensor is measured by the integrated circuit of the first semiconductor substrate, which provides a measured value of the first Hall sensor by the integrated circuit of the first semiconductor substrate; and a Hall signal from the second Hall sensor is measured by the integrated circuit of the second semiconductor substrate, which provides a measured value of the second Hall sensor by the integrated circuit of the second semiconductor substrate.
10. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 9 , wherein the Hall signal from the first Hall sensor and the Hall signal from the second Hall sensor are read out independently of one another.
11. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 9 , wherein the measured value of the first Hall sensor by the integrated circuit of the first semiconductor substrate and the measured value of the second Hall sensor by the integrated circuit of the second semiconductor substrate are read out independently of one another.
12. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 9 , wherein the Hall signal from the first Hall sensor, the Hall signal from the second Hall sensor, the measured value of the first Hall sensor by the integrated circuit of the first semiconductor substrate, and the measured value of the second Hall sensor by the integrated circuit of the second semiconductor substrate, are read out independently of one another.
13. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the first and the second semiconductor substrate are arranged in a manner rotated relative to one another.
14. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the first and the second semiconductor substrate have an underside lying opposite the top side; wherein the first and the second semiconductor substrate are arranged with their undersides on the carrier.
15. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the undersides of the first and of the second semiconductor substrate are fixed on the carrier by means of an insulating adhesive.
16. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the Hall sensor arrangement has contact strips and the first and the second semiconductor substrates have electrical contacts for providing a Hall signal; wherein the electrical contacts of the first and of the second semiconductor substrates for providing electrical signals are connected to dedicated contact strips.
17. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 16 , wherein the contact strips of the first semiconductor substrate are arranged in a manner lying opposite the contact strips of the second semiconductor substrate on the housing.
18. The Hall sensor arrangement for the redundant measurement of a magnetic field according to claim 1 , wherein the first and the second semiconductor substrates have electrical contacts for providing electrical signals; wherein the electrical contacts of the first and of the second semiconductor substrate for providing electrical signals are connected to dedicated contact strips.