Supporting structure and ion generator using the same
An ion generator includes: an arc chamber; a repeller that includes a repeller plate provided within the arc chamber and a repeller extension portion inserted through a through hole communicating the inside and the outside of the arc chamber; and a supporting structure that is provided outside the arc chamber and that supports the repeller so that a gap is ensured between the repeller extension portion and an inner wall of the through hole. The supporting structure includes a cover member that forms, outside the arc chamber, a small chamber communicating with the gap, and an insulation member that electrically insulates the arc chamber and the repeller from each other.
1. An ion generator, comprising:
an arc chamber;
a repeller that includes a repeller plate provided within the arc chamber and a repeller extension portion inserted through a through hole communicating the inside and the outside of the arc chamber; and
a supporting structure that is provided outside the arc chamber and that supports the repeller so that a gap is ensured between the repeller extension portion and an inner wall of the through hole, the supporting structure including a cover member that forms, outside the arc chamber, a small chamber communicating with the gap, and an insulation member that electrically insulates the arc chamber and the repeller from each other.
2. The ion generator of claim 1 , wherein the small chamber is hermetically closed outside the arc chamber.
3. The ion generator of claim 1 , wherein the insulation member is provided within the small chamber and connects the repeller extension portion and the cover member.
4. The ion generator of claim 3 , wherein the supporting structure further includes a shield member that is provided between the repeller extension portion and the insulation member and provided so as to cover an outer surface of the insulation member.
5. The ion generator of claim 1 , wherein the cover member is attached to the outside of the arc chamber through the insulation member.
6. The ion generator of claim 1 , wherein the repeller extension portion is fixed to the supporting structure by a connection member provided coaxially with the central axis of the through hole.
7. The ion generator of claim 1 , wherein:
the arc chamber has a threaded structure provided on the outside thereof and coaxially with the central axis of the through hole; and
the supporting structure is fixed to the arc chamber by being screwed onto the threaded structure.
8. A supporting structure for supporting a base of a repeller inserted through a through hole communicating the inside and the outside of an arc chamber so that a gap is ensured between the base and an inner wall of the through hole, the supporting structure comprising a cover member that forms, outside the arc chamber, a small chamber communicating with the gap, and an insulation member that electrically insulates the arc chamber and the repeller from each other.