Nonvolatile memory device and method for manufacturing same
When a thin channel semiconductor layer formed on a side wall of a stacked film in which insulating films and gate electrodes are alternately stacked together is removed on the stacked film, a contact resistance between a vertical transistor including the channel semiconductor layer and the gate electrode, and a bit line formed on the stacked film is prevented from rising. As its means, a conductive layer electrically connected to the channel semiconductor layer is disposed immediately above the stacked film.
1. A nonvolatile storage device, comprising:
a first conductive layer formed on a semiconductor substrate, and extended in a first direction along a main surface of the semiconductor substrate;
a select element formed on the first conductive layer, and electrically connected to the first conductive layer;
a stacked film including (N+1) (N is an integer of N≧1) first insulator films and N second conductive layers alternately stacked on the select element;
a first semiconductor layer and a memory material layer which are formed on a sidewall of the stacked film through a second insulator film, and electrically connected to the select element;
a third conductive layer formed on the stacked film, but not directly over the first semiconductor layer and the memory material layer in a stacking direction of the stacked film, and electrically connected to the first semiconductor layer; and
a fourth conductive layer formed on the third conductive layer, electrically connected to the third conductive layer, and extended in a second direction orthogonal to the first direction.
2. The nonvolatile storage device according to claim 1 , wherein a second semiconductor layer, having at least a portion formed in a different process than the first semiconductor layer, is formed between the first semiconductor layer and the second insulator film along the sidewall of the staked film.
3. The nonvolatile storage device according to claim 2 , wherein an uppermost surface of the second semiconductor layer is located in a region higher than a height of an uppermost surface of the second insulator film.
4. The nonvolatile storage device according to claim 1 , wherein the third conductive layer comes in direct contact with the fourth conductive layer.
5. The nonvolatile storage device according to claim 1 , wherein the memory material layer includes a variable resistance material, and is formed on the sidewall through the first semiconductor layer.
6. The nonvolatile storage device according to claim 1 , wherein an uppermost surface of the second insulator film is located in a region lower than a bottom surface of the third conductive layer, and higher than an upper surface of the second conductive layer.
7. The nonvolatile storage device according to claim 1 , wherein a third insulator film is formed between the memory material layer and the first semiconductor layer.
8. The nonvolatile storage device according to claim 1 , wherein the memory material layer includes a charge storage film, and is formed between the second insulator film and the first semiconductor layer.
9. The nonvolatile storage device according to claim 1 , wherein the stacked film has a hole extending from an upper surface of the stacked film to an upper surface of the select element in a region immediately above the first conductive layer and immediately below the fourth conductive layer, and
wherein the second insulator film and the first semiconductor layer are formed within the hole and on the sidewall of the stacked film.