Semiconductor device
According to an embodiment, a semiconductor device includes a conductive substrate, a Schottky barrier diode, and a field-effect transistor. The Schottky barrier diode is mounted on the conductive substrate and includes an anode electrode and a cathode electrode. The anode electrode is electrically connected to the conductive substrate. The field-effect transistor is mounted on the conductive substrate and includes a source electrode, a drain electrode, and a gate electrode. The source electrode of the field-effect transistor is electrically connected to the cathode electrode of the Schottky barrier diode. The gate electrode of the field-effect transistor is electrically connected to the anode electrode of the Schottky barrier diode.
1. A semiconductor device, comprising:
a conductive substrate;
a field-effect transistor mounted on the conductive substrate, the field-effect transistor including:
a transistor substrate;
a buffer layer disposed on the substrate;
a first semiconductor layer disposed on the buffer layer;
a second semiconductor layer disposed on the first semiconductor layer;
a source electrode disposed on the second semiconductor layer;
a drain electrode disposed on the second semiconductor layer, spaced apart from the source electrode; and
a gate electrode disposed between the source electrode and the drain electrode, and spaced apart from the source electrode and the drain electrode; and
a Schottky barrier diode mounted on the conductive substrate, the Schottky barrier diode including:
an anode electrode electrically connected to the conductive substrate;
a n-type semiconductor substrate disposed on the anode electrode;
a third semiconductor layer disposed on the n-type semiconductor substrate and having a resistance that is higher than a resistance of the n-type semiconductor substrate; and
a cathode electrode disposed on the third semiconductor layer;
wherein the source electrode is electrically connected to the cathode electrode and the gate electrode is electrically connected to the anode electrode.
2. The semiconductor device of claim 1 , wherein the transistor substrate has a resistivity greater than or equal to 100 Ωcm.
3. The semiconductor device of claim 1 , further comprising a heatsink connected to the conductive substrate.
4. The semiconductor device of claim 1 , wherein the conductive substrate comprises a conductive foil on an insulating material.
5. The semiconductor device of claim 1 , wherein the source electrode is electrically connected to the cathode with a first bonding wire, and the gate electrode is electrically connected to the anode electrode with a second bonding wire.
6. The semiconductor device of claim 1 , wherein the Schottky barrier diode is mounted on the conductive substrate using a conductive resin paste, and the field effect transistor is mounted on the conductive substrate using an insulating resin paste.
7. The semiconductor device of claim 1 , wherein the n-type semiconductor substrate and the third semiconductor layer comprise silicon.
8. The semiconductor device of claim 1 , further comprising:
a first external terminal electrically connected to the conductive substrate; and
a second external terminal electrically connected to the drain electrode.
9. The semiconductor device of claim 1 , wherein the field-effect transistor is a high-electron mobility transistor.
10. The semiconductor device of claim 1 , further comprising a gate insulating layer between the gate electrode and the second semiconductor layer.
11. A power semiconductor device, comprising:
a conductive substrate;
a field-effect transistor mounted on the conductive substrate, the field-effect transistor including:
a transistor substrate;
a buffer layer disposed on the substrate;
a first semiconductor layer disposed on the buffer layer, the first semiconductor layer comprising a first nitride semiconductor material;
a second semiconductor layer disposed on the first semiconductor layer, the second semiconductor layer comprising a second nitride semiconductor material;
a source electrode disposed on the second semiconductor layer;
a drain electrode disposed on the second semiconductor layer, spaced apart from the source electrode; and
a gate electrode disposed between the source electrode and the drain electrode, and spaced apart from the source electrode and the drain electrode; and
a Schottky barrier diode mounted on the conductive substrate, the Schottky barrier diode including:
an anode electrode electrically connected to the conductive substrate;
a n-type semiconductor substrate disposed on the anode electrode;
a third semiconductor layer disposed on the n-type semiconductor substrate and having a resistance that is higher than a resistance of the n-type semiconductor substrate; and
a cathode electrode disposed on the third semiconductor layer;
wherein the source electrode is electrically connected to the cathode electrode, the gate electrode is electrically connected to the anode electrode, the conductive substrate is electrically connected to a first external terminal, and the drain electrode is electrically connected to a second external terminal.
12. The power semiconductor device of claim 11 , wherein the first nitride semiconductor material is gallium nitride and the second nitride semiconductor material is aluminum gallium nitride.
13. The power semiconductor device of claim 11 , wherein the transistor substrate is conductive.
14. The power semiconductor device of claim 11 , further comprising a gate insulating layer between the gate electrode and the second semiconductor layer.