Apparatuses including electrodes having a conductive barrier material and methods of forming same
Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.
1. An apparatus, comprising:
a first chalcogenide structure, wherein the first chalcogenide structure comprises a switch;
a second chalcogenide structure stacked together with the first chalcogenide structure, wherein the second chalcogenide structure comprises a phase change memory storage element;
a first electrode portion coupled to the first chalcogenide structure;
a second electrode portion coupled to the second chalcogenide structure; and
an electrically conductive barrier material disposed between the first and second electrode portions.
2. The apparatus of claim 1 , wherein the electrically conductive barrier material comprises titanium nitride.
3. The apparatus of claim 1 , wherein the electrically conductive barrier material comprises tungsten silicide.
4. The apparatus of claim 1 , wherein the electrically conductive barrier material comprises silicon.
5. The apparatus of claim 4 , wherein the silicon is doped with boron.
6. The apparatus of claim 1 , wherein the first and second electrode portions comprise carbon.
7. The apparatus of claim 6 , wherein the electrically conductive barrier material is substantially not reactive to carbon.
8. The apparatus of claim 1 , wherein the first and second electrode portions comprise an electrically conductive and thermally insulative material.
9. The apparatus of claim 1 , wherein the first electrode portion is disposed between the first chalcogenide structure and the electrically conductive barrier material and the second electrode portion is disposed between the second chalcogenide structure and the electrically conductive barrier material.
10. A memory cell, comprising:
a phase change device configured to store one or more bits of data; and
a chalcogenide switch integrally formed in the memory cell with the phase change device and electrically coupled thereto through an electrode;
wherein the electrode comprises a first portion and a second portion separated by an electrically conductive barrier material.
11. The memory cell of claim 10 , wherein the electrically conductive barrier material is between approximately 5 and 50 angstroms in thickness.
12. The memory cell of claim 10 , wherein the electrically conductive barrier material is at least partially amorphous.
13. The memory cell of claim 10 , wherein the electrically conductive barrier material is at least partially crystalline.
14. The memory cell of claim 13 , wherein a grain boundary of the electrically conductive barrier material does not line up with a grain boundary of one of the phase change device or the switch.
15. The memory cell of claim 10 , wherein the first and second portions of the electrode are substantially not thermally conductive.
16. The memory cell of claim 15 , wherein the electrically conductive barrier material is thermally conductive.