Light emitting device, method of manufacturing the same, and electronic apparatus
Disclosed is an organic EL device as an light emitting device according to this application example includes a base material as a substrate, and an organic EL element as a plurality of light emitting elements having a light emitting functional layer as a functional layer in which an organic light emitting layer is included between a pixel electrode as an anode and an opposed electrode as a cathode and a sealing layer sealing the plurality of organic EL elements which are formed on the base material, and the opposed electrode is formed over the plurality of organic EL elements as a common cathode, and the sealing layer is formed so as to cover the common cathode in the same region where the common cathode is formed or inwards from the region.
1. A light emitting device comprising:
a substrate;
a plurality of light emitting elements having functional layers in which an organic light emitting layer is included between an anode and a cathode; and
a sealing layer that seals the plurality of light emitting elements,
wherein the sealing layer is formed so as to cover the cathode in the same region where the cathode is formed or inwards from the region,
wherein the cathode is formed over the plurality of light emitting elements as a common cathode and has a part that is not covered by the sealing layer, and
the cathode having an end portion that extends away from the light emitting elements at least as far as does an end portion of the sealing layer in a direction parallel to an upper surface of the substrate.
2. The light emitting device according to claim 1 ,
wherein a portion, which is not covered by the sealing layer, of the common cathode is passivated.
3. An electronic apparatus comprising:
the light emitting device according to claim 2 .
4. The light emitting device according to claim 1 , further comprising:
a wiring layer formed between the substrate and the common cathode; and
a contact portion that is formed between the wiring layer and the common cathode, is in contact with the common cathode of the portion covered by the sealing layer, and electrically connects with the wiring layer and the common cathode.
5. An electronic apparatus comprising:
the light emitting device according to claim 4 .
6. The light emitting device according to claim 1 ,
wherein the sealing layer includes a first inorganic sealing layer formed in contact with the common cathode, a buffer layer sequentially laminated on the first inorganic sealing layer, and a second inorganic sealing layer.
7. The light emitting device according to claim 6 ,
wherein the buffer layer is configured of an organic material.
8. An electronic apparatus comprising:
the light emitting device according to claim 7 .
9. An electronic apparatus comprising:
the light emitting device according to claim 6 .
10. The light emitting device according to claim 1 , further comprising:
a color filter formed to correspond to the plurality of light emitting elements on the sealing layer.
11. An electronic apparatus comprising:
the light emitting device according to claim 10 .
12. The light emitting device according to claim 1 , further comprising:
an opposed substrate disposed opposite with respect to the sealing layer of the substrate via a transparent resin layer.
13. The light emitting device according to claim 12 ,
wherein the transparent resin layer has a dam material preventing the transparent resin layer from protruding outwards from the opposed substrate, and wherein the dam material is provided in a position overlapping the outer edge of the sealing layer.
14. An electronic apparatus comprising:
the light emitting device according to claim 1 .
15. A method of manufacturing a light emitting device provided with a plurality of light emitting elements including a functional layer in which an organic light emitting layer is included between an anode and a cathode on a substrate, the method comprising:
forming the cathode over the plurality of light emitting elements as a common cathode;
forming a sealing layer that covers the common cathode and seals the plurality of light emitting elements in the same region where the common cathode is formed or inwards from the region so that the cathode has a part that is not covered by the sealing layer; and
forming the cathode having an end portion that extends away from the light emitting elements at least as far as does an end portion of the sealing layer in a direction parallel to an upper surface of the substrate.
16. The method of manufacturing a light emitting device according to claim 15 , further comprising,
patterning the common cathode using the sealing layer as a mask.
17. The method of manufacturing a light emitting device according to claim 16 ,
wherein the common electrode is dry-etched using treatment gas containing oxygen in the patterning of the common cathode.
18. The method of manufacturing the light emitting device according to claim 15 ,
wherein the forming of the sealing layer includes forming a first inorganic sealing layer in contact with the common cathode, forming a buffer layer in contact with the first inorganic sealing layer, and forming a second inorganic sealing layer covering the buffer layer.
19. The method of manufacturing a light emitting device according to claim 18 , further comprising:
performing a plasma treatment using the treatment gas containing oxygen on the substrate in which the first inorganic sealing layer is formed before the buffer layer is formed.
20. The method of manufacturing a light emitting device according to claim 15 ,
wherein the forming of the sealing layer has cutting a mother substrate while cutting a margin of the interval by forming the sealing layer at intervals with respect to scribe lines for extracting the substrate from the mother substrate using the mother substrate, on which the substrate is imposed in a plural number.