External gettering method and device
Disclosed embodiments include external gettering provided by electronic packaging. An external gettering element for a semiconductor substrate, which may be incorporated as part of an electronic packaging for the structure, is disclosed. Semiconductor structures and stacked semiconductor structures including an external gettering element are also disclosed. An encapsulation mold compound providing external gettering is also disclosed. Methods of fabricating such devices are also disclosed.
1. An external gettering element for providing gettering to a first substrate of a semiconductor device, said first substrate having a front side at which electrical devices are formed and a stress relieved backside opposite the front side, said external gettering element comprising:
a first gettering material, wherein said first gettering material contains an additive which provides the first gettering material with ions, the ions provided by the additive having the property of attracting ions and/or contaminants contained within the first substrate away from the front side; and
a first adhesive material for adhering said first gettering material to the backside of the first substrate.
2. The external gettering element of claim 1 , wherein said first gettering material is integrated into said first adhesive material.
3. The external gettering element of claim 2 , wherein said first adhesive material is a die attach film.
4. The external gettering element of claim 3 , wherein said die attach film is a dual-sided die attach film.
5. The external gettering element of claim 1 , wherein said first gettering material comprises a substrate that is compliant with electronic packaging.
6. The external gettering element of claim 5 , wherein said first gettering material comprises at least one of:
a polymeric material;
a ceramic material;
a silicon material; and
an epoxy-based material.
7. The external gettering element of claim 1 , further comprising a second external gettering element for gettering a second substrate, the second substrate having a front side at which electrical devices are formed and a backside opposite the front side, the second gettering element comprising:
a second gettering material, wherein the second gettering material containing an additive which provides the second gettering material with ions, the ions contained in the second getting material having the property of attracting ions and/or contaminants within the second substrate away from the front side of the second substrate; and
a second adhesive material for adhering said second gettering material to the backside of the second substrate; and,
wherein the first substrate and the second substrate are bonded together.
8. The external gettering element of claim 1 , further comprising a second substrate bonded to the first substrate, the second substrate having a front side at which electrical devices are formed and a backside opposite the front side and wherein the first gettering material is also adhered to the backside of the second substrate.
9. The external gettering element of claim 1 , wherein the first gettering material is a stand-alone material which is not integrated with the first adhesive material.
10. The external gettering element of claim 9 , further comprising a second substrate having a front side at which electrical devices are formed and a backside opposite the front side and a second gettering element for gettering the second substrate, the second gettering element comprising:
a second gettering material containing an additive which provides the second gettering material with ions, the ions contained in the second getting material having the property of attracting ions and/or contaminants within the second substrate away from the front side of the second substrate; and
a second adhesive material for adhering the second gettering material to the backside of the second substrate; and
wherein the second gettering material is a stand-alone material which is not integrated with the second adhesive material and the first and second substrates are bonded together.
11. The external gettering element of claim 10 , wherein the first and second substrates are bonded such that the first and second gettering elements are located between the bonded first and second substrates.
12. The external gettering element of claim 10 , wherein the first and second substrates are bonded such that the first gettering element and the device forming side of the second substrate are located between the first and second substrates.
13. The external gettering element of claim 1 , further comprising a molded encapsulation material provided around the first gettering material.
14. The external gettering element of claim 13 , wherein the encapsulation material has a gettering material embedded therein.