Gas detection apparatus and gas detection method
A gas is detected using a MEMS gas sensor. The electrical power to a heater in the gas sensor is changed between a low level, a high level suitable for detection of detection target gas, and a 0 level, and, therefore, poisonous gas is evaporated or oxidized at the low level, and the detection target gas is detected at the high level.
1. A gas detection apparatus, comprising:
a MEMS gas sensor provided with a gas detection portion having a heater on an insulating film on a surface of a silicon substrate, and a cavity directly below the insulating film around the gas detection portion;
a power source; and
a drive circuit for the MEMS gas sensor; wherein
the drive circuit is configured to change, during each of a plurality of cycles, the plurality of cycles having a duration of 5 seconds to 10 minutes, an electrical power to the heater between a low level suitable for evaporation or oxidization of poisonous gas operating for a period of time in a range of 0.1 second and 2 seconds, a high level suitable for detection of detection target gas operating for a period of time in a range of 0.02 second and 0.5 second, and a 0 level for a remaining time period of the respective cycle; and
the detection portion includes a SnO 2 film supporting a noble metal catalyst an electrode in contact with the SnO 2 film, and an oxidation catalyst film.
2. The gas detection apparatus according to claim 1 , the drive circuit changing the electrical power to the heater in order from the low level, to the high level, and then to the 0 level.
3. The gas detection apparatus according to claim 1 , the drive circuit not detecting the detection target gas at the low level.
4. The gas detection apparatus according to claim 1 , a temperature of the gas detection portion at the low level being 60 to 200° C.
5. The gas detection apparatus according to claim 4 , the temperature of the gas detection portion at the low level being 60 to 120° C.
6. The gas detection apparatus according to claim 1 , wherein:
the oxidation catalyst film covers the SnO 2 film.
7. The gas detection apparatus according to claim 6 , the drive circuit determining presence or absence of the poisonous gas based on a resistance of the SnO 2 film with the electrical power to the heater at the low level or at a level between the low level and the high level, and, in a case where it is determined that the poisonous gas of at least at a predetermined concentration is present, changing the electrical power to the heater between the low level, the high level, and the 0 level in a cyclic manner, and, in a case where it is determined that the poisonous gas of at least at a predetermined concentration is not present, changing the electrical power to the heater between the high level and the 0 level in an alternate manner.
8. The gas detection apparatus according to claim 1 , when restarting the gas detection apparatus from a stopped state, the drive circuit supplying the electrical power at the low level to the heater for a period of time longer than a supply time after completion of the restart.
9. A method for detecting a gas using a gas detection apparatus including a MEMS gas sensor provided with a gas detection portion having a heater on an insulating film on a surface of a silicon substrate, and a cavity directly below the insulating film around the gas detection portion, a power source, and a drive circuit for the MEMS gas sensor,
the method comprising the step of: causing the drive circuit to change, during each of a plurality of cycles, the plurality of cycles having a duration of 5 seconds to 10 minutes, an electrical power to the heater between a low level operating for a period of time in a range of 0.1 second to 2 seconds, a high level suitable for detection of detection target gas operating for a period of time in a range of 0.02 second and 0.5 second, and a 0 level for a remaining time period of the respective cycle, and thereby evaporating or oxidizing poisonous gas at the low level and detecting the detection target gas at the high level; wherein
the detection portion includes a SnO 2 film supporting a noble metal catalyst an electrode in contact with the SnO 2 film, and an oxidation catalyst film.