Apparatus, hybrid laminated body, method and materials for temporary substrate support

1. A laminated body comprising:

a light-transmitting support;

a latent release layer disposed upon the light-transmitting support;

a joining layer disposed upon the latent release layer; and

a polyamide thermoplastic priming layer disposed upon the joining layer.

2. A laminate according to claim 1 , wherein said light-transmitting support comprises glass.

3. A laminate according to claim 1 , wherein the latent release layer comprises a photothermal conversion layer.

4. A laminate according to claim 2 , wherein the latent release layer is activated upon exposure to actinic radiation that is emitted from a laser or laser diode.

5. A laminate according to claim 3 , wherein the photothermal conversion layer comprises a light-absorbing agent and a heat decomposable resin disposed adjacent the joining layer.

6. A laminate according to claim 5 , wherein said light-absorbing agent comprises carbon black.

7. A laminate according to claim 1 , wherein the joining layer comprises a thermosetting adhesive.

8. A laminate according to claim 7 , wherein the thermosetting adhesive comprises an acrylic adhesive.

9. A laminate according to claim 1 , further comprising a substrate in contact with the polyamide thermoplastic priming layer.

10. A laminate according to claim 9 wherein the substrate comprises a substrate to be ground that is a silicon wafer.

11. A method for manufacturing a laminate according to claim 1 , the method comprising:

coating the polyamide thermoplastic priming layer onto the substrate;

optionally, drying the polyamide thermoplastic priming layer if the coating includes a solvent;

coating the joining layer onto the polyamide thermoplastic priming layer;

optionally, curing the joining layer;

coating the latent release layer upon the light-transmitting support; and

laminating the latent release layer to the joining layer.

12. A method for manufacturing a laminate according to claim 11 further comprising:

processing the substrate;

irradiating the photothermal conversion layer through the light-transmitting support to decompose the photothermal conversion layer and thereby to separate the substrate and the light-transmitting support;

peeling the joining layer from said substrate; and

removing the polyamide thermoplastic priming layer from the substrate.

13. A method for manufacturing a laminate according to claim 12 , wherein removing the polyamide thermoplastic priming layer comprises washing the polyamide thermoplastic priming layer with solvent.

14. A method for manufacturing a laminate according to claim 1 , the method comprising:

coating the polyamide thermoplastic priming layer onto the light-transmitting support;

optionally, drying the polyamide thermoplastic priming layer if the coating includes a solvent;

coating the joining layer onto the polyamide thermoplastic priming layer;

optionally, curing the joining layer;

coating the latent release layer upon the substrate; and

laminating the latent release layer to the joining layer.

15. A method for manufacturing a laminate according to claim 14 further comprising:

processing the substrate;

irradiating the photothermal conversion layer through the light-transmitting support to decompose the photothermal conversion layer and thereby to separate the substrate and the light-transmitting support;

peeling the joining layer from said substrate; and

removing the polyamide thermoplastic priming layer from the substrate.

16. A method for manufacturing a laminate according to claim 15 , wherein removing the polyamide thermoplastic priming layer comprises washing the polyamide thermoplastic priming layer with solvent.